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Materials Science in Semiconductor Processing

Volumn 14, Issue 2, 2011, Pages 114-119

Indium doped zinc oxide thin films deposited by ultrasonic spray pyrolysis technique: Effect of the substrate temperature on the physical properties

(7) Castaneda L a Maldonado, A b Escobedo Morales, A a Avendano Alejo M c Gomez H d Vega Perez J e De La L Olvera, M b

a BENEMÉRITA UNIVERSIDAD AUTÓNOMA DE PUEBLA (Mexico)

b DEPARTAMENTO DE FÍSICA (Mexico)

c UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO (Mexico)

d UNIVERSIDAD AUTÓNOMA DEL ESTADO DE HIDALGO (Mexico)

e INSTITUTO POLITÉCNICO NACIONAL (Mexico)

Author keywords

Thin solid films; Ultrasonic spray pyrolysis; Zinc oxide

Indexed keywords

BAND-GAP VALUES; DOPED ZINC OXIDE THIN FILMS; ELECTRICAL RESISTIVITY; MINIMUM VALUE; OPTICAL CHARACTERISTICS; POLYCRYSTALLINE; PREFERRED GROWTH; RANDOM ORIENTATIONS; SODA LIME GLASS SUBSTRATE; SUBSTRATE TEMPERATURE; SUBSTRATES TEMPERATURE; THIN SOLID FILM; ULTRASONIC SPRAY PYROLYSIS; ULTRASONIC SPRAY PYROLYSIS TECHNIQUE; WURTZITE STRUCTURE; ZNO;

ELECTRIC CONDUCTIVITY OF SOLIDS; INDIUM; MORPHOLOGY; OPTICAL FILMS; OXIDE FILMS; SUBSTRATES; THIN FILMS; ULTRASONIC TESTING; ULTRASONICS; ZINC; ZINC OXIDE; ZINC SULFIDE;

SPRAY PYROLYSIS;

EID: 79958163849 PISSN: 13698001 EISSN: None Source Type: Journal
DOI: 10.1016/j.mssp.2011.01.013 Document Type: Article

Times cited : (35)

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