SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 519, Issue 18, 2011, Pages 6151-6154

Effect of Si substrate on ethanol gas sensing properties of ZnO films

(4) Zhou, Xiaoyan a Xue, Qingzhong a Ma, Ming a Li, Jianpeng a

a CHINA UNIVERSITY OF PETROLEUM (China)

Author keywords

Gas sensor; Resistivity; Si substrate; ZnO thin film

Indexed keywords

FORWARD BIAS VOLTAGE; GAS SENSING PROPERTIES; GAS SENSITIVITY; RADIO-FREQUENCY-MAGNETRON SPUTTERING; ROOM TEMPERATURE; SI SUBSTRATE; SI SUBSTRATES; SUBSTRATE RESISTIVITY; ZNO; ZNO FILMS; ZNO THIN FILM;

CHEMICAL DETECTION; CURRENT VOLTAGE CHARACTERISTICS; ETHANOL; GAS DETECTORS; GASES; HETEROJUNCTIONS; METALLIC FILMS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICON; X RAY DIFFRACTION; ZINC OXIDE;

SUBSTRATES;

EID: 79958129097 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.04.009 Document Type: Article

Times cited : (10)

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