Ammonia sensitivity of amorphous carbon film/silicon heterojunctions

Applied Physics Letters

Volumn 91, Issue 12, 2007, Pages

  Gao, Xili ^a   Xue, Qingzhong ^a   Hao, Lanzhong ^a   Zheng, Qingbin ^a   Li, Qun ^a  

^a CHINA UNIVERSITY OF PETROLEUM   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; AMMONIA; AMORPHOUS CARBON; AMORPHOUS FILMS; AMORPHOUS SILICON; BIAS VOLTAGE; CHEMICAL SENSORS; ELECTRIC SPACE CHARGE;

GAS DETECT SENSORS; GAS SENSITIVITY; REVERSE BIAS VOLTAGE;

HETEROJUNCTIONS;

EID: 34648822092     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2790371     Document Type: Article

References (13)

1. B. S. Kang, F. Ran, B. P. Gila, C. R. Abernathy, and S. J. Pearton, Appl. Phys. Lett. 84, 1123 (2004).
2. B. T. Marquis and J. F. Vetelino, Sens. Actuators B 77, 100 (2001).
3. T. Hyodo, J. Ohoka, Y. Shimizu, and M. Egashira, Sens. Actuators B 117, 359 (2006).
4. S. K. Dhawan, D. Kumar, M. K. Ram, S. Chandra, and D. C. Trivedi, Sens. Actuators B 40, 99 (1997).
5. L. L. Fields, J. P. Zheng, Y. Cheng, and P. Xiong, Appl. Phys. Lett. 88, 263102 (2006).
6. Y. G. Liu, P. Feng, X. Y. Xue, S. L. Shi, Q. Fu, C. Wang, Y. G. Wang, and T. H. Wang, Appl. Phys. Lett. 90, 042109 (2007).
7. S. G. Wang, Q. Zhang, D. J. Yang, P. J. Sellin, and G. F. Zhong, Diamond Relat. Mater. 13, 1327 (2004).
8. Y. X. Liang, Y. J. Chen, and T. H. Wang, Appl. Phys. Lett. 85, 666 (2004).
9. C. S. Huang, B. R. Huang, Y. H. Jang, M. S. Tsai, and C. Y. Yeh, Diamond Relat. Mater. 14, 1872 (2005).
10. X. T. Zhou, J. Q. Hu, C. P. Li, D. D. D. Ma, C. S. Lee, and S. T. Lee, Chem. Phys. Lett. 369, 220 (2003).
11. M. Arab, F. Berger, F. Picaud, C. Ramseyer, J. Glory, and M. Mayne-L'Hermite, Chem. Phys. Lett. 433, 175 (2006).
12. N. H. Quang, M. V. Trinh, B. H. Lee, and J. S. Huh, Sens. Actuators B 113, 341 (2006).
13. A. N. Donald, Semiconductor Physics and Devices (McGraw-Hill, Beijing, 2003), Chap. 11, p 454.