Investigation of periodical microstructures using coherent radiation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7638, Issue , 2010, Pages

  Janusas, Giedrius ^a   Palevicius, Arvydas ^a   Bendikiene, Regita ^a   Palevicius, Paulius ^a  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Periodical microstructure; polymer; replication; thermal deformation

Indexed keywords

COATED POLYMERS; COHERENT RADIATION; DIFFERENT THICKNESS; EFFICIENT METHOD; EXPERIMENTAL SETUP; EXPERIMENTAL VALUES; GEOMETRICAL PARAMETERS; OPTICAL PARAMETER; OPTIMIZATION AND CONTROL; PERIODICAL MICROSTRUCTURE; REPLICATION; REPLICATION PROCESS; TECHNOLOGICAL PROCESS; THERMAL CONDITION; THERMAL DEFORMATION; TRADITIONAL MEASUREMENT TECHNIQUES;

DEFORMATION; DIFFRACTION; GEOMETRY; MICHELSON INTERFEROMETERS; MICROSTRUCTURE; OPTICAL VARIABLES CONTROL; PARAMETER ESTIMATION; UNITS OF MEASUREMENT;

PROCESS CONTROL;

EID: 79958047620     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.855943     Document Type: Conference Paper

References (37)

1. M de Ridder, R., Driessen, A., Rikkers, E., Lambeck, P.V. and Diemeer, M.B.J., "Design and fabrication of electrooptic polymer modulators and switches," Optical Materials 12(2-3), 205-214 (1999).
2. Green, W.M.J., Rooks, M.J., Sekaric, L. and Vlasov Y.A., "Optical modulation using anti-crossing between paired amplitude and phase resonators," Optics Express 15(25), 17264-17272.
3. Janušas, G., Palevičius, A., Ostaševičius, V., Bansevičius, R. and Busilas, A., "Development and experimental analysis of piezoelectric optical scanner with implemented periodical microstructure," Journal of Vibroengineering 9(3), 10-14 (2007).
4. Kulakova, L.A. and Yakhkind, E.Z., "Acousto-optic modulator for IR diode laser radiation," J. Opt. A: Pure Appl. Opt 3, S9-S11 (2001).
5. Kondoh, T., Kashima, H., Yang, J. and Yoshida, Y., "Dynamic optical modulation of the electron beam for the high performance intensity modulated radiation therapy," Proc. PAC07, 2802-2804 (2007).
6. Yu, X., Zheng, X. and Zhang, H., "Polarization state rotation filter for optical generation of continuously tunable millimeter-wave signal employing an external intensity modulator," Optical Fiber Technology 13(1), 56-61 (2007).
7. Sepúlveda, B., Armelles, G. and Lechuga, L.M., "Magneto-optical phase modulation in integrated Mach-Zehnder interferometric sensors. Sensors and Actuators," A: Physical 134(2), 339-347 (2007).
8. Lo, Y.L. and Yu, T.C., "A polarimetric glucose sensor using a liquid-crystal polarization modulator driven by a sinusoidal signal," Optics Communications 259(1), 40-48 (2006).
9. He, N.; Jia, W., Gong, M. and Huang, L., "esign and mechanism analysis of a novel type compact single mirror laser scanner. Sensors and Actuators," A: Physical 125(2), 482-485 (2006).
10. Zhao, X., Zhou, C. and Liu, L., "Design of beam scanners based on Talbot-encoded phase plates," Optical Materials 23(1-2), 313-318 (2003).
11. Yeow, J.T.W., Yang, V.X.D., Chahwan, A., Gordon, M.L., Qi, B., Vitkin, I.A., Wilson, B.C. and Goldenberg, A.A., "Micromachined 2-D scanner for 3-D optical coherence tomography,"Sensors and Actuators A: Physical 117(2), 331-340 (2005).
12. Xu, G., Liu. Z., Ma, J., Liu, B. and Ho, S.T., "Organic electro-optic modulator using transparent conducting oxides as electrodes," Optics Express 13(19), 7380-7385.
13. Barr, B.W., Huttner, S.H., Taylor, J.R., Sorazu, B., Plissi, M.V. and Strain, K.A., "Optical modulation techniques for length sensing and control of optical cavities," Appl Opt. 46(31), 7739-7745 (2007).
14. Gieler, M., Aumayr, F., Gaggl, R., Neureiter, C. and Windholz, L., "Application of an electro-optical modulator in inelastic collision studies with laser-excited Na*(3p) atoms," J. Phys. B: At. Mol. Opt. Phys. 26, 297-303 (1993).
15. Steingrüber, R., Ferstl, M. and Pilz, W., "Micro-optical elements fabricated by electron-beam lithography and dry etching technique using top conductive coatings," Microelectronic Engineering 57-58, 285-289 (2001).
16. Harvey, T.G., Carter, N., Cinderey, M., Laidler, D.E., Ryan, T.G. and Summersgill, P., "Replication of free space micro-optical elements on glass substrates by UV-embossing," EOS Topical Meetings Digest 9, 20-21 (1996).
17. Leech, P.W., Lee, R.A. and Brett, A., "Sexton and Fiona Smith Hot embossing of micrographic elements in polypropylene," Microelectronic Engineering 84(1), 109-113 (2007).
18. Trinker, M., Jericha, E., Loidl, R. and Rauch, H., Microfabricated silicon gratings as neutron-optical components. Nuclear Instruments and Methods in Physics," Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 586(1), 124-128 (2008).
19. Content, D., "Diffraction grating groove analysis used to predict efficiency and scatter performance," Proc. SPIE 3778, 19-30 (1999).
20. Software "PCGrate" (www.pcgrate.com).
21. Software "GSolver" (http://www.gsolver.com/).
22. Goray, L.I. and Seely, J.F., "Efficiencies of master, replica, and multilayer gratings for the soft-x-ray-extreme-ultraviolet range: modeling based on the modified integral method nd comparisons with measurements, " Applied Optics 41(7), 1434-1445 (2002).
23. Goray, L.I., "Rigorous integral method in application to computing diffraction on relief gratings working in wavelength range from microwave to X-ray," Proc. SPIE 2532, 427-433 (1995).
24. Goray, L.I., "Modified integral method for weak convergence problems of light scattering on relief grating," Proc. SPIE 4291, 1-12 (2001).
25. Goray, L.I. and Chernov, B.C., "Comparison of rigorous methods for X-ray and XUV gratings diffraction analysis" Proc. SPIE 2515, 240-245 (1995).
26. Moharam, M.G., Pommet, D.A., Grann, E.B. and Gaylord, T.K., "Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings enhanced transmittance matrix approach, " J. Opt. Soc. Am A 12, 1077-1085 (1995).
27. Van Kraaij M.G.M.M. and Maubach, J.M.L., "A More Efficient Rigorous Coupled-Wave Analysis Algorithm," Progress in Industrial Mathematics at ECMI 8, 164-168 (2004).
28. Tamulevičius, S., Guobienė, A., Janušas, G., Palevičius, A., Ostaševičius, V. and Andrulevičius, M., "Optical characterization of diffractive optical elements replicated in polymers," Journal of Microlithography, Microfabrication and Microsystems 5(1), 013004/1-013004/6 (2006).
29. Janušas, G., Palevičius, A. and Bubulis, A., "Numerical analysis of holographic plate stability," Proc. Vibroengineering 2008, 83-86 (2008).
30. Tamulevicius, T., Tamulevičius, S., Andrulevičius, M., Griškonis, E., Puodžiukynas, L., Janušas, G. and Guobienė, A., "Formation of periodical microstructures using interference lithography," Experimental Techniques 2007 (online) doi: 10.1111/j.1747-1567.2007.00291.x, 1-6 (2007).
31. Janušas, G., Daučanskienė, K., Tamulevičius, S., Palevičius, A. and Tamulevičius, T., "Analysis of microstructures based on coherent optics methods. Proc. Vibroengineering 2006, 30-34 (2006).
32. Tamulevičius, T., Tamulevičius, S., Andrulevičius, M., Janušas, G. and Guobienė, A., "Optical evaluation of geometrical parameters of micro-relief structures," Materials science 12(4), 360-365 (2006).
33. Janušas, G., Guobienė, A., Andrulevičius, M., Tamulevičius, S., Palevičius, A. and Puodžiukynas, L., "Diffraction measurements in quality control of periodic structures," Proc. Vibroengineering 2004, 32-35 (2004).
34. Vass, Cs., Osvay, K., Csete, M. and Hopp, B., "Fabrication of 550 nm gratings in fused silica by laser induced backside wet etching technique," Applied Surface Science 253(19), 8059-8063 (2007).
35. Soppa, E., Doumalin, P., Binkele, P., Wiesendanger, T., Bornert, M. and Schmauder, S., "Experimental and numerical characterisation of in-plane deformation in two-phase materials," Computational Materials Science 21(3), 261-275 (2001).
36. Tamulevičius, S., Grigaliūnas, V., Jucius, D., Ostaševičius, V., Palevičius, A. and Janušas, G., "Thermal stress kinetics in the microresist-silicon system," Proc. SPIE 6151, 1-6 (2006).
37. Tamulevičius, T., Tamulevičius, S. Andrulevičius, M. Janušas, G. Ostaševičius, V. and Palevičius, A., "Optical characterization of microstructures of high aspect ratio," Proc. SPIE 6518, 1-9 (2007).