Micro-patterning of NdFeB and SmCo magnet films for integration into micro-electro-mechanical-systems

Journal of Magnetism and Magnetic Materials

Volumn 321, Issue 6, 2009, Pages 590-594

  Walther, A ^a,b   Marcoux, C ^a   Desloges, B ^a   Grechishkin, R ^c   Givord, D ^b   Dempsey, N M ^b  

^a CEA LETI   (France)

^b CNRS   (France)

^c TVER STATE UNIVERSITY   (Russian Federation)

Author keywords

Integration; MEMS; NdFeB films; SmCo films

Indexed keywords

ETCHING; HYSTERESIS; HYSTERESIS LOOPS; MAGNETIC FIELDS; MAGNETIC MATERIALS; MAGNETIC PROPERTIES; MAGNETS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL FILTERS; TANTALUM;

AMORPHOUS STATE; CHEMICAL-MECHANICAL PLANARIZATION; ETCH RATES; FILM DEPOSITIONS; HARD MAGNETIC FILMS; ION ETCHINGS; MAGNETIC HYSTERESIS LOOPS; MATERIAL REMOVAL RATES; MICRO FABRICATIONS; MICRO-ELECTRO- MECHANICAL SYSTEMS; MICRO-PATTERNING; MICRON-SCALE; MULTIPOLE MAGNETIC FIELDS; NDFEB FILMS; OVER-ETCH; PATTERNED FILMS; PATTERNED SUBSTRATES; PLANARIZATION; SM-CO MAGNETS; SMCO FILMS; VERTICAL SIDE WALLS;

NEODYMIUM ALLOYS;

EID: 60849126962     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmmm.2008.09.028     Document Type: Article

References (17)

1. Cugat O., Delamare J., and Reyne G. IEEE Trans. Mag. 39 (2003) 3608
2. Gutfleisch O., and Dempsey N.M. In: Asti G., Pareti L., and Ghidini M. (Eds). Magnetic Nanostructures in Modern Technology (2007), Springer, Berlin, New York 167
3. Zana I., Zangari G., Park J.-W., and Allen M.G. J. Magn. Magn. Mater. 272-276 (2004) e1775
4. R.P. Allen, S.D. Dahlgren, H.W. Arrowsmith, J.P. Heinrich, Technical report AFML-TR-74-87, (1974).
5. Kapitanov B.A., Kornilov N.V., Linetsky Ya.L., and Tsvetkov V.Yu. J. Magn. Magn. Mater. 127 (1993) 289
6. Walther A., Givord D., Dempsey N.M., Khlopkov K., and Gutfleisch O. J. Appl. Phys. 103 (2008) 043911
7. Dempsey N.M., Walther A., May F., Givord D., Khlopkov K., and Gutfleisch O. Appl. Phys. Lett. 90 (2007) 092509
8. Lemke H., Lang T., Giiddenhenrich T., and Heiden C. J. Magn. Magn. Mater. 148 (1995) 426
9. Wang J.J., Childress J.R., Pearton S.J., Sharifi F., Dabmen K.H., Giliman E.S., Cadieu F.J., Rani R., Qian X.R., and Chen L. J. Electrochem. Soc. 145 (1998) 2512
10. Budde T., and Gatzen H.H. J. Appl. Phys. 99 (2006) 08N304
11. Chen C.H., Walmer M.S., Walmer M.H., Gong W., and Ma B.-M. J. Appl. Phys. 85 (1999) 669
12. Grechishkin R., Chigirinsky S., Gusev M., Cugat O., and Dempsey N.M. In: Asti G., Pareti L., and Ghidini M. (Eds). Magnetic Nanostructures in Modern Technology (2007), Springer, New York 195
13. H. Chetouani, V. Haguet, C. Jeandey, C. Pigot, A. Walther, N.M. Dempsey, F. Chatelain, B. Delinchant, G. Reyne, Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS'07, (2007) 715.
14. M. Katter, K. Ûstüner, R. Blank, Proceedings of the 19th International Workshop on Rare Earth Magnets and their Appl., Beijing, China, 2006 p. 87.
15. Walther A., Khlopkov K., Gutfleisch O., Givord D., and Dempsey N.M. J. Magn. Magn. Mater. 316 (2007) 174
16. Dieppedale C., Desloges B., Rostaing H., Delamare J., Cugat O., and Meunier-Carus J. Proc. IEEE Sensors 2004 (2004) 493
17. The fabrication of a fully integrated RF micro-switch using RE-TM magnets is being studied within the framework of the ANR (French National Research Agency) "Nanomag2" project, which is a collaborative action between CEA-LETI, G2Elab, Institut Néel and Alcatel Alenia Space