Analyses of surface temperatures on patterned sapphire substrate for the growth of GaN with metal organic chemical vapor deposition

Applied Surface Science

Volumn 257, Issue 18, 2011, Pages 8062-8066

  Li, Zheng ^a   Jiang, Yuxuan ^a   Yu, Tongjun ^a   Yang, Zhiyuan ^a   Tao, Yuebin ^a   Jia, Chuanyu ^a   Chen, Zhizhong ^a   Yang, Zhijian ^a   Zhang, Guoyi ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

GaN; MOCVD; Patterned sapphire substrate; Surface temperature

Indexed keywords

ATMOSPHERIC TEMPERATURE; CHEMICAL ANALYSIS; FINITE ELEMENT METHOD; GALLIUM NITRIDE; III-V SEMICONDUCTORS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; ORGANIC CHEMICALS; ORGANOMETALLICS; SAPPHIRE; SURFACE PROPERTIES; TEMPERATURE DISTRIBUTION;

GAN EPITAXIAL GROWTH; HYDRODYNAMICS MODELING; PATTERN TOPOGRAPHY; PATTERNED SAPPHIRE SUBSTRATE; SUBSTRATE THICKNESS; SURFACE TEMPERATURE VARIATION; SURFACE TEMPERATURES; THERMAL DISTRIBUTIONS;

SURFACE TOPOGRAPHY;

EID: 79957909335     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.04.099     Document Type: Article

References (16)

1. M. Rossetti, T.M. Smeeton, W.-S. Tan, M. Kauer, S.E. Hooper, J. Heffernan, H. Xiu, and C.J. Humphreys Appl. Phys. Lett. 92 2008 151110
2. T.-X. Lee, C.-Y. Lin, S.-H. Ma, and C.-C. Sun Opt. Express 13 2000 4175
3. S.-M. Pan, R.-C. Tu, Y.-M. Fan, R.-C. Yeh, and J.-T. Hsu IEEE Photonics Technol. Lett. 15 2003 649
4. T Fujii, Y. Gao, R. Sharma, E.L. Hu, S.P. Denbaars, and S. Nakamura Appl. Phys. Lett. 84 2004 855
5. C.H. Liu, R.W. Chuang, S.J. Chang, Y.K. Su, L.W. Wu, and C.C. Lin Mater. Sci. Eng. B 112 2004 10 13
6. V. Lebedev, K. Tonisch, F. Niebelschütz, V. Cimalla, D. Cengher, I. Cimalla, Ch. Mauder, S. Hauguth, O. Ambacher, F.M. Morales, J.G. Lozano, and D. González J. Appl. Phys. 101 2007 054906
7. W.G. Breiland, M.E. Coltrin, J.R. Creighton, H.Q. Hou, H.K. Moffat, and J.Y. Tsao Mater. Sci. Eng., R 24 1999 241
8. D.I. Fotiadis, S. Kieda, and K.F. Jensen J. Cryst. Growth 102 1990 441
9. D.I. Fotiadis J. Cryst. Growth 100 1990 577
10. Q.S. Chen, P. Gao, and W.R. Hu J. Cryst. Growth 266 2004 320
11. Z.M. Li, Y. Hao, J.C. Zhang, L.A. Yang, S.R. Xu, Y.M. Chang, Z.W. Bi, X.W. Zhou, and J.Y. Ni J. Cryst. Growth 311 2009 4679 4684
12. S. Choi, H.J. Kim, J.-H. Ryou, and R.D. Dupuis J. Appl. Phys. 106 2009 073512
13. J.H. Lienhard IV, and J.H. Lienhard V A Heat Transfer Textbook 3rd ed. 2008 Phlogiston Cambridge
14. N.B. Vargaftik, Y.K. Vinogradov, and V.S. Yargin Handbook of Physical Properties of Liquids and Gases 1996 Begell House New York
15. H. Morkoc Nitride Semiconductors and Devices 1999 Springer Berlin
16. C.L. Caws Matheson Gas Data Book 2003 Chemical engineering press house Beijing