The low temperature polysilicon (LTPS) thin film MOS Schottky diode on glass substrate for low cost and high performance CO sensing applications

Sensors and Actuators, B: Chemical

Volumn 156, Issue 1, 2011, Pages 338-342

  Juang, Feng Renn ^a   Fang, Yean Kuen ^a   Chiang, Yen Ting ^a   Chou, Tse Heng ^b   Lin, Cheng I ^a   Lin, Cheng Wei ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b WUFENG INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

CO sensor; ELA; LTPS; Schottky diode; SnO2

Indexed keywords

CO SENSORS; ELA; LTPS; SCHOTTKY DIODES; SNO2;

AMORPHOUS FILMS; AMORPHOUS SILICON; CARBON MONOXIDE; CONDUCTIVE PLASTICS; DIODES; EXCIMER LASERS; FILM PREPARATION; GALLIUM NITRIDE; GAS LASERS; GLASS; GLASS LASERS; PLASMA APPLICATIONS; PLATINUM; POLYSILICON; SCHOTTKY BARRIER DIODES; SENSORS; SUBSTRATES; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 79957834438     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.04.043     Document Type: Article

References (26)

1. 2 sensors: current status and future prospects Sens. Actuator B 26-27 1995 1 12
2. 2 Sci. Technol. Adv. Mater. 6 2005 359 363 (Pubitemid 41203502)
3. C.Y. Liu, C.F. Chen, J.P. Leu, and Fabrication CO sensing properties of mesostructured ZnO gas sensors J. Electrochem. Soc. 156 2009 J16 J19
4. T.H. Chou, Y.K. Fang, Y.T. Chiang, K.C. Lin, C.I. Lin, C.H. Kao, and H.Y. Lin The Pd/TiO2/n-LTPS thin-film Schottky diode on glass substrate for hydrogen sensing applications IEEE Electron. Device Lett. 29 2008 1232 1235
5. x/diamond Sens. Actuator B 56 1999 151 154
6. I. Lundström, S. Shivaraman, C. Svensson, and L. Lundkvist A hydrogen-sensitive MOS field-effect transistor Appl. Phys. Lett. 26 1975 55 57
7. 2 gaseous sensor IEEE Electron. Device Lett. 8 1987 211 213 (Pubitemid 17582627)
8. x or ZnO)-insulator-semiconductor gas sensors Sens. Actuator B 22 1994 47 55
9. 3 multilayer thin film gas sensor Mater. Res. Bull. 35 2000 741 745
10. I.H. Song, S.H. Kang, W.J. Nam, and M.K. Han A high-performance multichannel dual-gate poly-Si TFT fabricated by excimer laser irradiation on a floating a-Si thin film IEEE Electron. Device Lett. 24 2003 580 582
11. J.H. Lee, J.H. Kim, and M.K. Han A new a-Si:H TFT pixel circuit compensating the threshold voltage shift of a-Si:H TFT and OLED for active matrix OLED IEEE Electron. Device Lett. 26 2005 897 899
12. 2 thin film deposited by chemical reactive evaporation method Mater. Sci. Eng. B 139 2007 69 73 (Pubitemid 46550805)
13. S.R. Wang, Y.Q. Zhao, J. Huang, Y. Wang, S.H. Wu, S.M. Zhang, and W.P. Huang Low-temperature carbon monoxide gas sensors based gold/tin dioxide Solid-State Electron. 50 2006 1728 1731 (Pubitemid 44792694)
14. H. Yamaura, T. Jinkawa, J. Tamaki, K. Moriya, N. Miura, and N. Yamazoe Indium oxide-based gas sensor for selective detection of CO Sens. Actuator B 36 1996 325 332 (Pubitemid 126375926)
15. R. Klingvall, I. Lundstrom, and M. Eriksson Sub ppm detection of hydrogen IEEE Sens. J. 8 2008 301 307
16. 2Si/n-Si Schottky diodes from I-V-T measurements Semicond. Sci. Technol. 23 2008 035003
17. G. Neri, A. Bonavita, S. Galvagno, C. Pace, and N. Donato Preparation, characterization and CO sensing of Au/iron oxide thin films J. Mater. Sci. 13 2002 561 565 (Pubitemid 35327303)
18. L.D. Prockop, and R.I. Chichkova Carbon monoxide intoxication: an updated review J. Neurol. Sci. 262 2007 122 130 (Pubitemid 47390903)
19. 2:Pt based sensors Appl. Phys. Lett. 90 2007 173114
20. 2 carbon monoxide sensor Sens. Actuator B 96 2003 88 93
21. G.Y. Zhao, W. Sutton, D. Pavlidis, E.L. Piner, J. Schwank, and S. Hubbard A novel Pt-AlGaN/GaN heterostructure Schottky diode gas sensor on Si IEICE Trans. Electron. E86-C 2003 2027 2031
22. 2 thin films for gas sensor prepared by r.f. reactive sputtering Sens. Actuator B 25 1995 465 468
23. 2 films Sens. Actuator B 70 2000 196 202
24. G.B. Barbi, J.P. Santos, P. Serrini, P.N. Gibson, M.C. Horrillo, and L. Manes Ultrafine grain-size tin-oxide films for carbon monoxide monitoring in urban environments Sens. Actuator B 25 1995 559 563
25. 2 as sensing material for gas sensors Solid-State Electron. 48 2004 627 632
26. E.H. Rhodorick, and R.H. Williams Metal Semiconductor Contacts 2nd ed. 1988 Oxford University Press New York