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Thin Solid Films

Volumn 519, Issue 15, 2011, Pages 4969-4973

Properties of polyimide/Al2O3 and Si 3N4 deposited thin films

(7) Tsai, Mei Hui a Wang, Hong Yi a Lu, Hsu Tung a Tseng, I Hsiang a Lu, Hung Hua a Huang, Shih Liang a Yeh, Jui Ming b

a NATIONAL CHIN YI UNIVERSITY OF TECHNOLOGY (Taiwan)

b CHUNG YUAN CHRISTIAN UNIVERSITY (Taiwan)

Author keywords

Polyimide Al2O3 hybrid; RF magnetron sputtering; Silicon nitride; Water vapor transmission rate

Indexed keywords

BARRIER FILMS; DENSER STRUCTURE; GAS BARRIER; HYBRID FILM; INTERFACE BONDING; PI FILM; RF MAGNETRON SPUTTERING; ROOT MEAN SQUARE (RMS) SURFACE ROUGHNESS; SPUTTERING PRESSURES; THERMAL STABILITY; TWO-STEP REACTIONS; WATER VAPOR TRANSMISSION RATE; XPS;

ALUMINUM; COMPOSITE FILMS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; NANOCOMPOSITES; PHASE INTERFACES; POLYIMIDES; SILICON; SILICON NITRIDE; SURFACE ROUGHNESS; WATER VAPOR;

GAS PERMEABLE MEMBRANES;

EID: 79957649091 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2011.01.063 Document Type: Conference Paper

Times cited : (40)

References (21)

1
- 77950580297
- M.C. Choi, J.C. Hwang, C. Kim, S. Ando, and C.S. Ha J. Polym. Sci. Polym. Chem. 48 2010 1806
- (2010) J. Polym. Sci. Polym. Chem. , vol.48 , pp. 1806
- Choi, M.C.¹ Hwang, J.C.² Kim, C.³ Ando, S.⁴ Ha, C.S.⁵

2
- 33751407723
- C.J. Chang, and H.Y. Tzeng Polymer 47 2006 8536
- (2006) Polymer , vol.47 , pp. 8536
- Chang, C.J.¹ Tzeng, H.Y.²

3
- 34249656797
- C.J. Chang, M.S. Wu, and P.C. Kao J. Polym. Sci. Polym. Phys. 45 2007 1152
- (2007) J. Polym. Sci. Polym. Phys. , vol.45 , pp. 1152
- Chang, C.J.¹ Wu, M.S.² Kao, P.C.³

4
- 31644441741
- M.H. Tsai, P.C. Chiang, W.T. Whang, C.J. Ko, and S.L. Huang Surf. Coat. Technol. 200 2006 3297
- (2006) Surf. Coat. Technol. , vol.200 , pp. 3297
- Tsai, M.H.¹ Chiang, P.C.² Whang, W.T.³ Ko, C.J.⁴ Huang, S.L.⁵

5
- 77958156131
- M.H. Tsai, and W.T. Whang Polymer 42 2001 4197
- (2001) Polymer , vol.42 , pp. 4197
- Tsai, M.H.¹ Whang, W.T.²

6
- 33750462783
- M.H. Tsai, S.J. Liu, and P.C. Chiang Thin Solid Films 515 2006 1126
- (2006) Thin Solid Films , vol.515 , pp. 1126
- Tsai, M.H.¹ Liu, S.J.² Chiang, P.C.³

7
- 65649125484
- M.H. Tsai, and W.T. Whang J. Appl. Polym. Sci. 81 2001 2500
- (2001) J. Appl. Polym. Sci. , vol.81 , pp. 2500
- Tsai, M.H.¹ Whang, W.T.²

8
- 33751240486
- M.H. Tsai, and C.J. Ko Surf. Coat. Technol. 201 2006 4367
- (2006) Surf. Coat. Technol. , vol.201 , pp. 4367
- Tsai, M.H.¹ Ko, C.J.²

9
- 48449093393
- K.C. Chang, H.F. Lin, C.Y. Lin, T.H. Kuo, H.H. Huang, S.C. Hsu, J.M. Yen, J.C. Yang, and Y.H. Yu J. Nanosci. Nanotechnol. 8 2008 3040
- (2008) J. Nanosci. Nanotechnol. , vol.8 , pp. 3040
- Chang, K.C.¹ Lin, H.F.² Lin, C.Y.³ Kuo, T.H.⁴ Huang, H.H.⁵ Hsu, S.C.⁶ Yen, J.M.⁷ Yang, J.C.⁸ Yu, Y.H.⁹

10
- 33344468832
- C. Charton, N. Schiller, M. Fahland, A. Hollander, A. Wedel, and K. Noller Thin Solid Films 502 2006 99
- (2006) Thin Solid Films , vol.502 , pp. 99
- Charton, C.¹ Schiller, N.² Fahland, M.³ Hollander, A.⁴ Wedel, A.⁵ Noller, K.⁶

11
- 0034832229
- B.M. Henry, A.G. Erlat, A. McGuigan, C.R.M. Grovenor, G.A.D. Briggs, Y. Tsukahara, T. Miyamoto, N. Noguchi, and T. Niijima Thin Solid Films 382 2001 194
- (2001) Thin Solid Films , vol.382 , pp. 194
- Henry, B.M.¹ Erlat, A.G.² McGuigan, A.³ Grovenor, C.R.M.⁴ Briggs, G.A.D.⁵ Tsukahara, Y.⁶ Miyamoto, T.⁷ Noguchi, N.⁸ Niijima, T.⁹

12
- 33847123660
- M.C. Lin, C.H. Tseng, L.S. Chang, and D.S. Wuu Thin Solid Films 515 2007 4596
- (2007) Thin Solid Films , vol.515 , pp. 4596
- Lin, M.C.¹ Tseng, C.H.² Chang, L.S.³ Wuu, D.S.⁴

13
- 33645763715
- C.C. Chiang, D.S. Wuu, H.B. Lin, Y.P. Chen, T.N. Chen, Y.C. Lin, C.C. Wu, W.C. Chen, T.H. Jaw, and R.H. Horng Surf. Coat. Technol. 200 2006 5843
- (2006) Surf. Coat. Technol. , vol.200 , pp. 5843
- Chiang, C.C.¹ Wuu, D.S.² Lin, H.B.³ Chen, Y.P.⁴ Chen, T.N.⁵ Lin, Y.C.⁶ Wu, C.C.⁷ Chen, W.C.⁸ Jaw, T.H.⁹ Horng, R.H.¹⁰

14
- 20744436683
- D.S. Wuu, W.C. Lo, C.C. Chiang, H.B. Lin, L.S. Chang, R.H. Horng, C.L. Huang, and Y.J. Gao Surf. Coat. Technol. 198 2005 114
- (2005) Surf. Coat. Technol. , vol.198 , pp. 114
- Wuu, D.S.¹ Lo, W.C.² Chiang, C.C.³ Lin, H.B.⁴ Chang, L.S.⁵ Horng, R.H.⁶ Huang, C.L.⁷ Gao, Y.J.⁸

15
- 50349099253
- M.C. Lin, L.S. Chang, and H.C. Lin Surf. Coat. Technol. 202 2008 5440
- (2008) Surf. Coat. Technol. , vol.202 , pp. 5440
- Lin, M.C.¹ Chang, L.S.² Lin, H.C.³

16
- 0037142166
- J.H. Chang, D.K. Park, and K.J. Ihn J. Appl. Polym. Sci. 84 2002 2294
- (2002) J. Appl. Polym. Sci. , vol.84 , pp. 2294
- Chang, J.H.¹ Park, D.K.² Ihn, K.J.³

17
- 73849083398
- D.S. Wuu, T.N. Chen, E. Lay, C.H. Chang, H.F. Wei, L.Y. Jiang, H.U. Lee, and Y.Y. Chang J. Electrochem. Soc. 157 2010 47
- (2010) J. Electrochem. Soc. , vol.157 , pp. 47
- Wuu, D.S.¹ Chen, T.N.² Lay, E.³ Chang, C.H.⁴ Wei, H.F.⁵ Jiang, L.Y.⁶ Lee, H.U.⁷ Chang, Y.Y.⁸

18
- 44249115319
- W.S. Lau, S. Gunawan, Joy B.H. Tan, and B.P. Singh Microelectron. Reliab. 48 2008 187
- (2008) Microelectron. Reliab. , vol.48 , pp. 187
- Lau, W.S.¹ Gunawan, S.² Tan, J.B.H.³ Singh, B.P.⁴

19
- 78049264274
- C.J. Weng, J.Y. Huang, K.Y. Huang, Y.S. Jhuo, M.H. Tsai, and J.M. Yeh Electrochim. Acta 55 2010 8430
- (2010) Electrochim. Acta , vol.55 , pp. 8430
- Weng, C.J.¹ Huang, J.Y.² Huang, K.Y.³ Jhuo, Y.S.⁴ Tsai, M.H.⁵ Yeh, J.M.⁶

20
- 33646540462
- A. Franquet, M. Biesemans, H. Terryn, R. Willem, and J. Vereecken Surf. Interface Anal. 38 2006 172
- (2006) Surf. Interface Anal. , vol.38 , pp. 172
- Franquet, A.¹ Biesemans, M.² Terryn, H.³ Willem, R.⁴ Vereecken, J.⁵

21
- 0031961327
- G.G. Biino, P. Groning, and T. Meisel Meteorit. Planet. Sci. 33 1998 89
- (1998) Meteorit. Planet. Sci. , vol.33 , pp. 89
- Biino, G.G.¹ Groning, P.² Meisel, T.³

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