Effects of nitrogen partial pressure on titanium oxynitride films deposited by reactive RF magnetron sputtering onto PET substrates

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5440-5443

  Lin, M C ^a   Chang, L S ^a   Lin, H C ^b  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Gas permeation; Magnetron sputtering; Polyethylene terephthalate; Titanium oxynitride

Indexed keywords

NITRIDES; NITROGEN; NONMETALS; PLASTIC BOTTLES; REACTIVE SPUTTERING; TIN; TITANIUM; TITANIUM COMPOUNDS; TITANIUM NITRIDE;

GAS PERMEATION; NITROGEN PARTIAL PRESSURES; POLYETHYLENE TEREPHTHALATE; RF-MAGNETRON SPUTTERING; TITANIUM OXYNITRIDE;

MAGNETRON SPUTTERING;

BOTTLES; GAS; NITRIDES; NITROGEN; NONMETALS; PENETRATION; PLASTIC CONTAINERS; POLYETHYLENE TEREPHTHALATE; TIN; TITANIUM; TITANIUM COMPOUNDS;

EID: 50349099253     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.066     Document Type: Article

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