Characterization of the silicon oxide thin films deposited on polyethylene terephthalate substrates by radio frequency reactive magnetron sputtering

Thin Solid Films

Volumn 515, Issue 11, 2007, Pages 4596-4602

  Lin, M C ^a   Tseng, C H ^a   Chang, L S ^a   Wuu, D S ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Gas transmission rate; Polyethylene terephthalate (PET); Silicon oxide; Sputtering

Indexed keywords

ARGON; DEPOSITION; MAGNETRON SPUTTERING; MORPHOLOGY; OXYGEN; POLYETHYLENE TEREPHTHALATES; RADIO FREQUENCY AMPLIFIERS; SILICON COMPOUNDS; SUBSTRATES; SURFACE ROUGHNESS;

GAS TRANSMISSION RATE; POLYETHYLENE TEREPHTHALATE SUBSTRATES; REACTIVE MAGNETRON SPUTTERING; SILICON OXIDE;

THIN FILMS;

EID: 33847123660     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.11.039     Document Type: Article

References (13)

1. Bartzsch H., Glob D., Bocher B., Frach P., and Goedicke K. Surf. Coat. Technol. 174/175 (2003) 774
2. Martinet C., Paillard V., Gagnaire A., and Joseph J. J. Non-Cryst. Solids 216 (1997) 77
3. Brody A.L. Packing Technol. Eng. (Feb. 1994) 44
4. Yializis A., Mikhael M.G., and Ellwanger R.E. Proceedings of the 43rd Annual Technical Conference (Apr 15-20 2000), Society of Vacuum Coaters, Denver, U.S.A. 404
5. Henry B.M., Dinelli F., Zhao K.-Y., Grovenor C.R.M., Kolosov O.V., Briggs G.A.D., Roberts A.P., Kumar R.S., and Howson R.P. Thin Solid Films 355-356 (1999) 500
6. Jankowski A.F., Hayes J.P., Felter T.E., Evans C., and Nelson A.J. Thin Solid Films 420-421 (2002) 43
7. Leterrier Y., Boogh L., Andersons J., and Manson J.A.E. J. Polym. Sci., B, Polym. Phys. 35 (1997) 1449
8. Teshima K., Inoue Y., Sugimura H., and Takai O. Vacuum 66 (2002) 353
9. Tadanaga K., Iwashita K., and Minami T. J. Sol-Gel Sci. Technol. 6 (1996) 107
10. Casey F., Smith A.W., and Ellis G. Proceedings of the 42nd Annual Technical Conference (Apr 17-22 1999), Society of Vacuum Coaters, Chicago, U.S.A. 415
11. Yokoyama S., Iseki K., Ohya T., Konmeda S., Yamada Y., and Ishihara H. Proceedings of the 42nd Annual Technical Conference (Apr 17-22 1999), Society of Vacuum Coaters, Chicago, U.S.A. 450
12. Erlat A.G., Wang B.-C., Spontak R.J., Tropsha Y., Mar K.D., Montgomery D.B., and Vogler E.A. J. Mater. Res. 15 (2000) 704
13. Roberts A.P., Henry B.M., Sutton A.P., Grovenor C.R.M., Briggs G.A.D., Miyamoto T., Kano M., Tsukahara Y., and Yanaka M. J. Membr. Sci. 208 (2002) 75