EUV-induced physico-chemical changes in near-surface layers of polymers

Journal of Electron Spectroscopy and Related Phenomena

Volumn 184, Issue 3-6, 2011, Pages 270-275

  Bartnik, A ^a   Fiedorowicz, H ^a   Jarocki, R ^a   Kostecki, J ^a   Szczurek, M ^a   Chernyayeva, O ^b   Sobczak, J W ^b  

^a MILITARY UNIVERSITY OF TECHNOLOGY   (Poland)

^b INSTITUTE OF PHYSICAL CHEMISTRY   (Poland)

Author keywords

Extreme ultraviolet; Laser plasma; Radiation treatment; Surface modification

Indexed keywords

CHEMICAL CHANGE; CHEMICAL STRUCTURE; EUV SOURCE; EXTREME ULTRAVIOLET; FOCAL PLANE; GAS PUFF TARGETS; GRAZING INCIDENCE; IRRADIATED POLYMERS; LASER PLASMA; MICRO AND NANOSTRUCTURES; NANO-STRUCTURING; NEAR-SURFACE LAYERS; PHYSICO-CHEMICAL CHANGES; PLASMA RADIATION; POLYETHYLENE NAPHTHALATE; POLYMER FOIL; POLYMER SAMPLES; RADIATION TREATMENT; SCANNING ELECTRON MICROSCOPES; SINGLE SHOTS; SURFACE MODIFICATION; WAVELENGTH RANGES; XPS SPECTRA;

CYCLOTRON RESONANCE; EXTREME ULTRAVIOLET LITHOGRAPHY; FOCUSING; FUNCTIONAL GROUPS; FUNCTIONAL POLYMERS; KRYPTON; LASER PRODUCED PLASMAS; LIGHT SOURCES; MORPHOLOGY; PHOTOELECTRON SPECTROSCOPY; PLASMA INTERACTIONS; POLYETHYLENE TEREPHTHALATES; POLYETHYLENES; POLYIMIDES; RADIATION; SCANNING ELECTRON MICROSCOPY; SURFACE TREATMENT; THERMOPLASTICS; ULTRAVIOLET LASERS; X RAY PHOTOELECTRON SPECTROSCOPY;

SURFACE MORPHOLOGY;

EID: 79957582737     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2010.12.030     Document Type: Article

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