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Volumn 96, Issue 4, 2009, Pages 727-730
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Ablation and surface modifications of PMMA using a laser-plasma EUV source
a
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Author keywords
[No Author keywords available]
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Indexed keywords
EUV SOURCE;
EXCIMER LAMPS;
EXTREME ULTRAVIOLET RADIATIONS;
FLUENCES;
FOCAL PLANE;
GAS-PUFF TARGET;
GOLD-COATED;
IRRADIATED POLYMERS;
LASER PLASMA;
LONG-WAVELENGTH TAIL;
MICRO STRUCTURING;
POLYMETHYLMETHACRYLATES;
RADIATION PENETRATION;
REPETITION RATE;
SCANNING ELECTRON MICROSCOPE;
SURFACE MODIFICATION;
ULTRA-VIOLET;
ABLATION;
CHEMICAL MODIFICATION;
EXCIMER LASERS;
EXTREME ULTRAVIOLET LITHOGRAPHY;
GAS LASERS;
LASER PRODUCED PLASMAS;
LIGHT SOURCES;
PHOTORESISTS;
PLASMA INTERACTIONS;
POLYMERS;
SCANNING ELECTRON MICROSCOPY;
SURFACE TREATMENT;
ULTRAVIOLET DEVICES;
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EID: 69049114958
PISSN: 09462171
EISSN: None
Source Type: Journal
DOI: 10.1007/s00340-009-3692-8 Document Type: Article |
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Times cited : (50)
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References (10)
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