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Volumn 81, Issue 19, 2002, Pages 3636-3638
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Lateral diffusion of titanium disilicide as a route to contacting hybrid Si/organic nanostructures
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC DIFFUSIONS;
BULK ELECTRODES;
DISILICIDES;
LATERAL DIFFUSION;
LATERAL EXTENSION;
MICROSCOPIC PATTERNS;
NANOSCOPIC SCALE;
ATOMIC FORCE MICROSCOPY;
SCANNING TUNNELING MICROSCOPY;
SILICIDES;
TITANIUM;
TITANIUM COMPOUNDS;
DIFFUSION;
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EID: 79956048049
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1519959 Document Type: Article |
Times cited : (4)
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References (20)
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