Stressed metal probes for atomic force microscopy

Applied Physics Letters

Volumn 81, Issue 16, 2002, Pages 3070-3072

  Hantschel, Thomas ^a   Chow, Eugene M ^a   Rudolph, Dirk ^a   Fork, David K ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; CANTILEVER PROBE; DEEP STRUCTURE; METAL PROBES; PROBE CHIPS; SCANNING PROBES; TRANSPARENT SUBSTRATE;

MICROMETERS; NANOCANTILEVERS; SUBSTRATES;

ATOMIC FORCE MICROSCOPY;

EID: 79956017841     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1514830     Document Type: Article

References (9)

1. O. Wolter, Th. Bayer, and J. Greschner, J. Vac. Sci. Technol. B 9, 1353 (1991). jvb JVTBD9 0734-211X
2. T. R. Albrecht, S. Akamine, T. E. Carver, and C. F. Quate, J. Vac. Sci. Technol. A 8, 3386 (1990). jva JVTAD6 0734-2101
3. T. Hantschel, S. Slesazeck, N. Duhayon, M. Xu, and W. Vandervorst, Proc. SPIE 4175, 50 (2000). spi PSISDG 0277-786X
4. Ph. Niedermann, W. Hänni, D. Morel, A. Perret, N. Skinner, P.-F. Indermühle, N.-F. de Rooij, and P.-A. Buffat, Appl. Phys. A: Mater. Sci. Process. 66, S31 (1998). mfc APAMFC 0947-8396
5. D. L. Smith, and A. S. Alimonda, Proceedings of the 48th Electronic Components and Technology Conference, Orlando, Florida, May 1996, p. 325.
6. E. M. Chow, H. T. Soh, H. C. Lee, J. D. Adams, S. C. Minne, G. Yaralioglu, A. Atalar, C. F. Quate, and T. W. Kenny, Sens. Actuators A 83, 118 (2000). sac SAAPEB 0924-4247
7. P. Vettiger, M. Despont, U. Drechsler, U. Dürig, W. Häberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, IBM J. Res. Dev. 44, 323 (2000). ibm IBMJAE 0018-8646
8. D. K. Fork, C. Chua, P. Kim, L. Romano, R. Lau, L. Wong, A. S. Alimonda, V. Geluz, M. Teepe, J. Haemer, M. Modi, Q. Zhu, D. Ma, S. Sitaraman, D. L. Smith, and S. Mok, Proc. SPIE 4176, 226 (2000). spi PSISDG 0277-786X
9. D. Knipp, R. A. Street, B. Krusor, R. B. Apte, and J. Ho, Proc. SPIE 3366, 8 (2001). spi PSISDG 0277-786X