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Applied Physics Letters

Volumn 80, Issue 22, 2002, Pages 4127-4129

Spatially-resolved valence-electron energy-loss spectroscopy of Zr-oxide and Zr-silicate films

(2) Ikarashi, Nobuyuki a Manabe, Kenzo a

a NEC CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BAND GAPS; ELECTRON PROBE; ENERGY-LOSS SPECTROSCOPY; SCANNING TRANSMISSION ELECTRON MICROSCOPY; SI SUBSTRATES;

DISSOCIATION; ELECTRON ENERGY LEVELS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON SCATTERING; ELECTRONIC STRUCTURE; ELECTRONS; ENERGY GAP; OXIDE FILMS; SILICATES; SILICON; TRANSMISSION ELECTRON MICROSCOPY; ZIRCONIUM ALLOYS;

ZIRCONIUM;

EID: 79955996497 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1483130 Document Type: Article

Times cited : (9)

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