Implementing and validating double patterning in 22-nm to 16-nm product design and patterning flows

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7640, Issue , 2010, Pages

  Noh, Myung Soo ^a   Seo, Beom Seok ^a   Lee, Suk Joo ^a   Miloslavsky, Alex ^b   Cork, Christopher ^c   Barnes, Levi ^b   Lucas, Kevin ^b  

^a SAMSUNG Electronics   (South Korea)

^b SYNOPSYS INC   (United States)

^c Synopsys SARL   (France)

Author keywords

compliance; design rules; double patterning; DPT; dual patterning; performance; scalability

Indexed keywords

INTEGRATED CIRCUIT LAYOUT; PROBABILITY DISTRIBUTIONS; SCALABILITY; TITRATION;

COMPLIANCE; DESIGN RULES; DOUBLE PATTERNING; DPT; DUAL PATTERNING; PERFORMANCE;

GEOMETRY;

EID: 79955801238     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.848194     Document Type: Conference Paper

References (6)

1. Drapeau, M. Wiaux, V., Hendrickx, E. Verhaegen, and S. Machida, T., "Patterning design split implementation and validation for the 32nm Node" Proc. SPIE 6521, 652109 (2007).
2. Cork, C., Ward, B., Barnes, L., Painter, B., Lucas, K., Luk-Pat, G., Wiaux, V., Verhaegen, S., and Maenhoudt, M., "Checking design conformance and optimizing manufacturability using automated double patterning decomposition" Proc. SPIE 6925, 69251Q (2008).
3. Seo, B-S., Kang, D-K., Noh, M-S., Lee, S-H., Luk-Pat, G., Miloslavsky, A., Li X., Lucas, K., and Lee S., "Double patterning addressing imaging challenges for near and k1=0.25 node layouts" Proc. SPIE, 7379, 73791N (2009).
4. Cork, C., Lucas, K., Hapli, H., Raffard H., and Barnes, L., "Large-scale double-patterning compliant layouts for DP engine and design rule" Proc. SPIE 7275, 72751K (2009).
5. Lucas, K., Cork, C., Miloslavsky, A., Barnes, L., Hapli, J., Lewellen, J., Rollings, G., Wiaux, V., and Verhaegen, S., "Double-patterning interactions with wafer processing, optical proximity correction, and physical design flows, Journal of Micro/Nanolithography, MEMS, and MOEMS 8(3), 033002 (2009)
6. Barnes, L., Li, Y., Wadkins, D., Biederman, S., Miloslavsky, A., and Cork, C., "Parallel Processing for Pitch Splitting Decomposition" Proc SPIE, 7488, 74882L (2009).