메뉴 건너뛰기




Volumn 98, Issue 17, 2011, Pages

High resolution study of the strong diamond/silicon nitride interface

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND COATING; DIAMOND CRYSTALS; DIAMOND-LIKE CARBON; EPITAXIAL RELATIONSHIPS; HIGH RESOLUTION; INTERFACE STRENGTH; MECHANICAL SOLICITATIONS; THIN LAYERS;

EID: 79955684407     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3584019     Document Type: Article
Times cited : (15)

References (27)
  • 1
    • 33751164850 scopus 로고    scopus 로고
    • Machining behaviour of silicon nitride tools coated with micro-, submicro- and nanometric HFCVD diamond crystallite sizes
    • DOI 10.1016/j.diamond.2006.08.006, PII S0925963506002688
    • F. A. Almeida, M. Amaral, F. J. Oliveira, and R. F. Silva, Diamond Relat. Mater. 0925-9635 15, 2029 (2006). 10.1016/j.diamond.2006.08.006 (Pubitemid 44779231)
    • (2006) Diamond and Related Materials , vol.15 , Issue.SPEC. ISS.11-12 , pp. 2029-2034
    • Almeida, F.A.1    Amaral, M.2    Oliveira, F.J.3    Silva, R.F.4
  • 9
  • 12
    • 0001120305 scopus 로고    scopus 로고
    • Epitaxially oriented growth of diamond on silicon by hot filament chemical vapor deposition
    • DOI 10.1063/1.116451, PII S0003695196013022
    • Q. Chen, L. -X. Wang, Z. Zhang, J. Yang, and Z. Lin, Appl. Phys. Lett. 0003-6951 68, 176 (1996). 10.1063/1.116451 (Pubitemid 126683997)
    • (1996) Applied Physics Letters , vol.68 , Issue.2 , pp. 176-178
    • Chen, Q.1    Wang, L.-X.2    Zhang, Z.3    Yang, J.4    Lin, Z.5
  • 13
    • 0009665836 scopus 로고    scopus 로고
    • HRTEM and energy filtering TEM study of interfacial reaction between diamond film and silicon
    • DOI 10.1016/0925-9635(96)00554-7, PII S0925963596005547
    • L. Chang, F. R. Chen, C. J. Chen, and T. S. Lin, Diamond Relat. Mater. 0925-9635 5, 1282 (1996). 10.1016/0925-9635(96)00554-7 (Pubitemid 126377112)
    • (1996) Diamond and Related Materials , vol.5 , Issue.11 , pp. 1282-1287
    • Chang, L.1    Chen, F.R.2    Chen, C.J.3    Lin, T.S.4
  • 16
    • 0034614714 scopus 로고    scopus 로고
    • A nucleation site and mechanism leading to epitaxial growth of diamond films
    • DOI 10.1126/science.287.5450.104
    • S. T. Lee, H. Y. Peng, X. T. Zhou, N. Wang, C. S. Lee, I. Bello, and Y. Lifshitz, Science 0036-8075 287, 104 (2000). 10.1126/science.287.5450.104 (Pubitemid 30033228)
    • (2000) Science , vol.287 , Issue.5450 , pp. 104-106
    • Lee, S.T.1
  • 20
    • 12444286820 scopus 로고    scopus 로고
    • BEN-HFCVD diamond nucleation on Si(111) investigated by HRTEM and nanodiffraction
    • DOI 10.1016/j.diamond.2004.09.015, PII S0925963504002997
    • S. Pecoraro, J. C. Arnault, and J. Werckmann, Diamond Relat. Mater. 0925-9635 14, 137 (2005). 10.1016/j.diamond.2004.09.015 (Pubitemid 40146332)
    • (2005) Diamond and Related Materials , vol.14 , Issue.2 , pp. 137-143
    • Pecoraro, S.1    Arnault, J.C.2    Werckmann, J.3
  • 21
    • 44449177698 scopus 로고    scopus 로고
    • Microstructure investigation of positive/negative direct current bias-enhanced diamond deposition
    • DOI 10.1016/j.tsf.2007.10.076, PII S0040609007017361
    • M. J. Chiang and M. H. Hon, Thin Solid Films 0040-6090 516, 5953 (2008). 10.1016/j.tsf.2007.10.076 (Pubitemid 351763758)
    • (2008) Thin Solid Films , vol.516 , Issue.18 , pp. 5953-5958
    • Chiang, M.J.1    Hon, M.H.2
  • 25
    • 17644362296 scopus 로고    scopus 로고
    • Effects of substrate temperature on nanocrystalline diamond growth: An in-situ optical study using pyrometric interferometry
    • DOI 10.1016/j.tsf.2004.11.113, PII S0040609004016967, EMRS 2004, Symposium J
    • P. Bruno, F. B́ńdic, F. Mohasseb, F. Silva, and K. Hassouni, Thin Solid Films 0040-6090 482, 50 (2005). 10.1016/j.tsf.2004.11.113 (Pubitemid 40567770)
    • (2005) Thin Solid Films , vol.482 , Issue.1-2 , pp. 50-55
    • Bruno, P.1    Benedic, F.2    Mohasseb, F.3    Silva, F.4    Hassouni, K.5
  • 26
    • 0001230337 scopus 로고
    • 0925-9635, 10.1016/0925-9635(96)00297-2
    • H. Liu and D. S. Dandy, Diamond Relat. Mater. 0925-9635 4, 1173 (1995). 10.1016/0925-9635(96)00297-2
    • (1995) Diamond Relat. Mater. , vol.4 , pp. 1173
    • Liu, H.1    Dandy, D.S.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.