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Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1038-1046

Nucleation and early growth of CVD diamond on silicon nitride

(4) Buchkremer Hermanns, H a Ren, H a Kohlschein, G a Weiss H a

a UNIVERSITY OF SIEGEN (Germany)

Author keywords

Diamond; Early growth model; Growth kinetics; MW PACVD; Nucleation kinetics; Silicon nitride substrate

Indexed keywords

EID: 0001260242 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00237-5 Document Type: Article

Times cited : (21)

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