Feedforward control for reduced run-to-run variation in microelectronics manufacturing

IEEE Transactions on Semiconductor Manufacturing

Volumn 12, Issue 4, 1999, Pages 493-502

  Ruegsegger, Steven ^a   Wagner, Aaron ^b   Freudenberg, James S ^b   Grimard, Dennis S ^b  

^a IBM MICROELECTRONICS   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; GRAPHICAL USER INTERFACES; INTERACTIVE COMPUTER GRAPHICS;

CRITICAL DIMENSION (CD); FEEDFORWARD RECIPE SELECTION CONTROL (FRSC); VARIANCE REDUCTION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0033324213     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.806127     Document Type: Article

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