SCOPUS 정보 검색 플랫폼

Volumn 109, Issue 7, 2011, Pages

Thermal activation and saturation of ion beam sculpting

Author keywords

[No Author keywords available]

Indexed keywords

ADATOM DIFFUSION; CRITICAL TEMPERATURES; ION IRRADIATION; MODEL-BASED; THERMAL ACTIVATION; VISCOUS-FLOW MODELS;

ION BEAMS; IONS; TEMPERATURE;

AMORPHOUS MATERIALS;

EID: 79955455100 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3569705 Document Type: Conference Paper

Times cited : (3)

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