Spiral scanning method for atomic force microscopy

Journal of Nanoscience and Nanotechnology

Volumn 10, Issue 7, 2010, Pages 4511-4516

  Hung, Shao Kang ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Atomic Force Microscopy; Spiral Scanning Method; Trajectory Planning

Indexed keywords

IMAGE DISTORTIONS; IMAGING SPEED; LINESCANNING; PIEZOELECTRIC SCANNER; SPIRAL SCANNING; TRAJECTORY PLANNING;

ATOMIC FORCE MICROSCOPY; IMAGE RESOLUTION;

SCANNING;

EID: 79955373238     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2010.2353     Document Type: Conference Paper

References (15)

1. R. Wiesendanger, Scanning Probe Microscopy and Spectroscopy, Cambridge University Press, UK (1994).
2. K. R. Koops, P. M. L. O. Scholte, and W. L. de Koning, Appl. Phys. A68, 691 (1999).
3. H. Jung, J. Y. Shim, and D. G. Gweon, Nanoteclmology 12, 14 (2001).
4. K. Takahashi, K. Tateishi, Y. Tomita, and S. Ohsawa, Jpn. J. Appl. Phys. 43, 4801 (2004).
5. S. K. Hung, E. T. Hwu, 1. S. Hwang, and L. C. Fu, Jpn. J. Appl. Phys. 45, 1917 (2006).
6. B. M. Chen, T. H. Lee, C. C. Hang, Y Guo, and S. Weerasooriya, IEEE Trans. Control Syst. Technol. 7, 160 (1999).
7. G. E. Fantner, P. Hegarty, J. H. Kindt, G. Schitter, G. A. G. Cidade, and P. K. Hansma, Rev. Sci. lustrum. 76, 026118 (2005).
8. J. H. Kindt, G. E. Fantner, J. A. Cutroni, and P. K. Hansma, Ultramicroscopy 100, 259 (2004).
9. G. T. Paloczi, B. L. Smith, P. K. Hansma, D. A. Waltersa, and M. A. Wendman, Appl. Phys. Lett. 73, 1658 (1996).
10. S. R. Manalis, S. C. Minne, and C. F Quate, Appl. Phys. Lett. 68, 8771 (1996).
11. G. Schitter, F Allgower, and A. Stemmer, Nanoteclmology 15, 108 (2004).
12. G. Binnig, C. F Quate, and Ch. Gerber, Phys. Rev. Lett. 56, 930 (1976).
13. K. K. Leang, Iterative learning control of hysteresis in piezo-based nano-positioners: Theory and application in atomic force microscopes, Ph.D. Dissertation. Department of Mechanical Engineering, University of Washington (2004).
14. S. K. Hung, Design and control of Novel Atomic Force Microscope Systems, Ph.D. Dissertation, Department of Electrical Engineering, National Taiwan University (2007).
15. E. T. Hwu, S. K. Hung, C. W. Yang, I. S. Hwang, and K. Y Huang, Appl. Phys. Lett. 91, 221908 (2007).