Simultaneous detection of translational and angular displacements of micromachined elements

Applied Physics Letters

Volumn 91, Issue 22, 2007, Pages

  Hwu, E T ^a   Hung, S K ^a   Yang, C W ^a   Hwang, I S ^a   Huang, K Y ^b  

^a INSTITUTE OF PHYSICS   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC EQUIPMENT; MICROFABRICATION; NATURAL FREQUENCIES; THERMAL EFFECTS;

ANGULAR DISPLACEMENTS; MICROFABRICATED CANTILEVERS; MICROMACHINED ELEMENTS; VERTICAL DISPLACEMENTS;

MICROMACHINING;

EID: 36549074536     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2817750     Document Type: Article

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