Soft polymer MEMS

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 332-335

  Gerratt, Aaron P ^a   Tellers, Mary ^a   Bergbreiter, Sarah ^a  

^a UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE POLYMER; ELASTOMERIC MATERIALS; FABRICATION PROCESS; HIGH-ASPECT RATIO; IN-PLANE; LARGE STRAINS; POLYMER MEMS ACTUATORS; SOFT POLYMERS; THERMAL ACTUATOR;

ACTUATORS; ASPECT RATIO; FABRICATION; MECHANICAL ENGINEERING; MECHANICS; POLYMERS; REACTIVE ION ETCHING;

MEMS;

EID: 79953802925     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734429     Document Type: Conference Paper

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