Silicon optical modulator with integrated grating couplers based on 0.18-μ m complementary metal oxide semiconductor technology

Optical Engineering

Volumn 50, Issue 4, 2011, Pages

  Xu, Haihua ^a   Li, Zhiyong ^a   Zhu, Yu ^a   Li, Yuntao ^a   Yu, Yude ^a   Yu, Jinzhong ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

grating coupler; modulation; pre emphasis; silicon photonics

Indexed keywords

COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES; DATA TRANSMISSION RATES; FIGURE OF MERIT; GRATING COUPLERS; HIGH-SPEED MODULATION; MACH-ZEHNDER OPTICAL MODULATOR; MODULATION EFFICIENCY; OPTICAL MODULATORS; PIN DIODE; PRE-EMPHASIS; SILICON PHOTONICS;

DATA COMMUNICATION SYSTEMS; METALLIC COMPOUNDS; MODULATION; MOS DEVICES; PHOTONIC DEVICES; PHOTONIC INTEGRATION TECHNOLOGY; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; TRANSISTORS;

LIGHT MODULATORS;

EID: 79953797925     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.3560264     Document Type: Article

References (18)

1. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor., Nature (London) 427, 615-618 (2004). 10.1038/nature02310 (Pubitemid 38248476)
2. L. Liao, D. Samara-Rubio, M. Morse, A. Liu, H. Hodge, D. Rubin, U. D. Keil, and T. Franck, High-speed silicon Mach-Zehnder modulator., Opt. Express 13, 3129-3135 (2005). 10.1364/OPEX.13.003129 (Pubitemid 40899177)
3. L. Zhou and A. W. Poon, Silicon electro-optic modulators using p-i-n diodes embedded 10-micron-diameter microdisk resonators., Opt. Express 14, 6851-6857 (2006). 10.1364/OE.14.006851 (Pubitemid 44118124)
4. W. M. J. G. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, Ultra-compact, low RF power, 10Gbs silicon Mach-Zehnder modulator., Opt. Express 15, 17106-17113 (2007). 10.1364/OE.15.017106 (Pubitemid 350260570)
5. Q. Xu, B. Manipatruni, B. Schmidt, J. Shakya, and M. Lipson, 12.5 Gbits carrier-injection-based silicon micro-ring silicon modulators., Opt. Express 15, 430-436 (2007). 10.1364/OE.15.000430 (Pubitemid 46168487)
6. F. Gan, S. J. Spector, M. W. Geis, M. E. Grein, R. T. Schulein, J. U. Yoon, T. M. Lyszczarz, and F. X. Krtner, Compact, low-power, high-speed silicon electro-optic modulator., in Conference on Lasers and Electro-Optics Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest Series (CD) (Optical Society of America, 2007), paper CTuQ6.
7. A. Liu, L. Liao, D. Rubin, H. Nguyen, B. Ciftcioglu, Y. Chetrit, N. Izhaky, and M. Paniccia, High-speed optical modulation based on carrier depletion in a silicon waveguide., Opt. Express 15, 660-668 (2007). 10.1364/OE.15.000660 (Pubitemid 46168516)
8. D. Marris-Morini, L. Vivien, J. M. Fédéli, E. Cassan, P. Lyan, and S. Laval, Low loss and high speed silicon optical modulator based on a lateral carrier depletion structure., Opt. Express 16, 334-339 (2008). 10.1364/OE.16.000334
9. J. B. You, M. Park, J. W. Park, and G. Kim, 12.5 Gbps optical modulation of silicon racetrack resonator based on carrier-depletion in asymmetric p-n diode., Opt. Express 16, 18340-18344 (2008). 10.1364/OE.16.018340
10. X. Zheng, J. Lexau, Y. Luo, H. Thacker, T. Pinguet, A. Mekis, G. Li, J. Shi, P. Amberg, N. Pinckney, K. Raj, R. Ho, J. E. Cunningham, and A. V. Krishnamoorthy, Ultra-low-energy all-CMOS modulator integrated with driver., Opt. Express 18, 3059-3070 (2010). 10.1364/OE.18.003059
11. E. Bogatin, Signal Integrity-Simplified, Prentice Hall, New Jersey (2003).
12. D. Taillaert, W. Bogaerts, P. Bienstman, T. F. Krauss, P. Van Daele, I. Moerman, S. Verstuyft, K. De Mesel, and R. Baets, An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers., IEEE J. Quantum Electron. 38 (7), 949-955 (2002). 10.1109/JQE.2002.1017613
13. F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T. F. Krauss, and R. Baets, Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides., J. Lightwave Technol. 25 (1), 151-156 (2007). 10.1109/JLT.2006.888164 (Pubitemid 46562995)
14. R. A. Soref and B. R. Bennett, Electrooptical effects in silicon., IEEE J. Quantum Electron. 23, 123-129 (1987). 10.1109/JQE.1987.1073206
15. http://www.photond.com.
16. A. Vonsovici, R. Orobtchouk, and A. Koster, Numerical simulation of a silicon-on-insulator waveguide Fabry-Perot interferometer for intensity light modulators at 1.3m., J. Lightwave Technol. 15 (11), 2124-2129 (1997). 10.1109/50.641532 (Pubitemid 127569136)
17. A. Liu, L. Liao, D. Rubin, J. Basak, Y. Chetrit, H. Nguyen, R. Cohen, N. Izhaky, and M. Paniccia, Recent development in a high-speed silicon optical modulator based on reverse-biased pn diode in a silicon waveguide., Semicond. Sci. Technol. 23, 064001 (2008). 10.1088/0268-1242/23/6/064001
18. H. Xu, Q. Huang, Y. Li, Y. Yu, and J. Yu, Sub nanosecond optical switch based on silicon racetrack resonator., Chin. Phys. B 19 (8), 084210 (2010). 10.1088/1674-1056/19/8/084210