Design of a high-Q CMOS-compatible MEMS tunable capacitor for RF applications

Proceedings of the 6th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro-Electronics and Micro-Systems - EuroSimE 2005

Volumn 2005, Issue , 2005, Pages 335-337

  Nasirzadeh, N ^a   Abbaspourt, E ^a   Dadashzadeh, G ^b  

^a Urmia MEMS Lab   (Iran)

^b IRAN TELECOMMUNICATION RESEARCH CENTER   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS-COMPATIBLE MEMS; RF APPLICATIONS; SUBMICRON CMOS TECHNOLOGIES; TUNABLE CAPACITOR;

CAPACITORS; ELECTRIC POTENTIAL; INTEGRATED CIRCUIT LAYOUT; NATURAL FREQUENCIES; POLYSILICON; RADIO SYSTEMS; VARACTORS;

CMOS INTEGRATED CIRCUITS;

EID: 33745726148     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESIME.2005.1502824     Document Type: Conference Paper

References (7)

1. Clark T. and C. Nguyen, Linda P.B. Katehi and G. M. Rebeiz, "Micromachined Devices for Wireless Communications", Proceedings of the IEEE, Vol.86, No.8, pp-1756-1767, 1998.
2. Alexander Dec and Ken Suyama, "Miromachined capacitors and their application to RF IC's " , IEEE Transactions on Microwave Theory and Techniques, Vol.46, No. 12, pp.2587-2596, 1998.
3. Alexander Dec and Ken Suyama, "2.4GHz CMOS LC VCO using Micromachined Variable capacitors for frequency tuning", Microwave Symposium Digest, 1999 IEEE MTT-S International Vol.1, pp.79-82, 1999.
4. Z. Feng, W.Zhang, B. Su, Gupta, Bright and Lee, "Design and modeling of RF MEMS tunable capacitors using electro-thermal actuators", Microwave Symposium digest, 1999 IEEE MTT-S International, Vol.4, pp. 1507-1510, 1999.
5. Harsh, K. F. Zhang, Bright, and Lee, "Flip-chip assembly for Si-based RF MEMS", Micro Eelctro Mechanical Systems, MEMS '99. Twelfth IEEE International Conference on, pp.273-278, 1999.
6. M. Bakri-Kassem and Raafat. R. Mansour, "Two Movable-Plate Nitride-Loaded MEMS Variable Capacitor", IEEE Transactions on Microwave Theory and Applications, Vol. 52, No. 3, March 2004
7. Saeed Moaveni, Finite Eelement Analysis: Theory and Applications with ANSYS, Prentice Hall, 1999.