CMOS-MEMS variable capacitors with low parasitic capacitance for frequency-reconfigurable RF circuits

Digest of Papers - IEEE Radio Frequency Integrated Circuits Symposium

Volumn , Issue , 2009, Pages 509-512

  Reinke, John ^a   Jajoo, Abhishek ^a   Wang, Leon ^a   Fedder, Gary ^a,b,c   Mukherjee, Tamal ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Capacitors; Electrothermal effects; Microelectromechanical devices; Q factor; Tunable amplifiers

Indexed keywords

CMOS-MEMS; ELECTROTHERMAL EFFECTS; FRONT-END DESIGN; LOW-PARASITIC; MEASURED RESULTS; PARASITIC CAPACITANCE; Q FACTOR; QUALITY FACTORS; RE-CONFIGURABLE; RECONFIGURABLE CIRCUITS; RECONFIGURABLE RF CIRCUITS; SELF RESONANT FREQUENCY; TUNABLE AMPLIFIERS; TUNING RATIO;

AUDIO FREQUENCY AMPLIFIERS; BANDPASS FILTERS; CAPACITANCE; CAPACITORS; DIGITAL INTEGRATED CIRCUITS; INTEGRATED CIRCUITS; MEMS; NATURAL FREQUENCIES; POWER AMPLIFIERS; Q FACTOR MEASUREMENT; RADIO; RADIO FREQUENCY AMPLIFIERS; RADIO WAVES; VARIABLE FREQUENCY OSCILLATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 70350244584     PISSN: 15292517     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RFIC.2009.5135591     Document Type: Conference Paper

References (9)

1. A. Oz and G. K. Fedder, "RF CMOS-MEMS Capacitor Having Large Tuning Range," Solid-State Sensor and Actuator Workshop, June 8-12, 2003.
2. D. Ramachandran, A. Oz, V. K. Saraf, G. K. Fedder, T. Mukherjee, "MEMS-Enabled Reconfigurable VCO and RF Filter", IEEE RFIC Symp. Dig., pp. 251-254, June 2004.
3. A. Jajoo, L. Wang, and T. Mukherjee, "MEMS Varactor Enabled Frequency-Reconfigurable LNA and PA in the Upper UHF Band," IEEE IMS Dig., June 2009.
4. G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C Lu and L. R. Carley, "Laminated High-Aspect Ratio Microstructures In A Conventional CMOS Process," Sensors & Actuators, vol. A57, no. 2, pp 103-110, March 1997.
5. P. J. Gilgunn, J. Liu, N. Sarkar, and G. K. Fedder, "CMOS-MEMS Lateral Electrothermal Actuators," J. Microelectromech. Syst., vol. 17, no. 1, Feb. 2008.
6. G. Zhang, H. Xie, L. E. deRosset and G. Fedder, "A Lateral Capacitive CMOS Accelerometer with Structural Curl Compensation," IEEE MEMS, pp. 606-611, Jan. 1999.
7. D. K. Shaeffer and T. H. Lee, "A 1.5-V, 1.5-GHz CMOS low noise amplifier," IEEE JSSC, vol. 32, no. 5, pp. 745-759, May 1997.
8. K. W. Kobayashi et. al., "Ultra-low dc power GaAs HBT Sand C-band low noise amplifiers for portable wireless applications," IEEE MTT, vol. 43, no. 12, pp. 3055-3061, Dec. 1995.
9. N. Sokal, "Class-E RF Power Amplifiers," QEX, no. 204, pp 9-20, Jan/Feb 2001.