Nano-electromechanical zero-dimensional freestanding nanogap actuator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 1357-1360

  Han, Jun Hyun ^a   Yoshimizu, Norimasa ^b   Cheng, Tiffany ^b   Ziwisky, Michael ^a   Bhave, Sunil A ^b   Lal, Amit ^b   Lee, Chung Hoon ^a  

^a MARQUETTE UNIVERSITY   (United States)

^b Cornell University ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON COUPLING; ELECTRON TRANSPORT; GAP SIZE; INDUSTRIAL STANDARDS; METAL ELECTRODES; MICROMACHINED; NANO SCALE; NANO-ELECTROMECHANICAL; NANO-GAP; OPTICAL LITHOGRAPHY; PIEZOELECTRIC ACTUATION; WET CHEMICALS; ZERO-DIMENSIONAL;

ELECTRODES; MECHANICAL ENGINEERING; MECHANICS; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING;

MEMS;

EID: 79953772958     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734686     Document Type: Conference Paper

References (16)

1. D. R. Strachan, D. E. Smith, D. E. Johnston, T.-H. Park, M. J. Therien, D. A. Bonnell, and A. T. Johnson, "Controlled fabrication of nanogaps in ambient environment for molecular electronics," Appl. Phys. Lett., vol. 86, p. 043109, 2005.
2. D. P. Fromm, A. Sundaramurthy, P. J. Schuck, G. Kino, and W. E. Moerner, "Gap-dependent optical coupling of single "bowtie" nanoantennas resonant in the visible," Nano Lett., vol. 4, no. 5, pp. 957-961, 2004. (Pubitemid 38716358)
3. K. Iwami, T. Ono, and M. Esashi, "Optical near-field probe integrated with self-aligned bow-tie antenna and electrostatic actuator for local field enhancement," Microelectromechanical Systems, Journal of, vol. 15, no. 5, pp. 1201-1208, 2006. (Pubitemid 44566938)
4. A. Partridge, J. Reynolds, J. Grade, B. Kane, N. Maluf, G. Kovacs, and T. Kenny, "An integrated controller for tunnel sensors," Solid-State Circuits, IEEE Journal of, vol. 34, no. 8, pp. 1099-1107, 1999.
5. M. Yi, K.-H. Jeong, and L. P. Lee, "Theoretical and experimental study towards a nanogap dielectric biosensor," Biosensors and Bioelectronics, vol. 20, no. 7, pp. 1320-1326, 2005. (Pubitemid 39601662)
6. C. S. Ah, Y. J. Yun, J. S. Lee, H. J. Park, D. H. Ha, and W. S. Yun, "Fabrication of integrated nanogap electrodes by surface-catalyzed chemical deposition," Appl. Phys. Lett., vol. 88, p. 133116, 2006.
7. M. D. Fischbein and M. Drndic, "Sub-10 nm device fabrication in a transmission electron microscope," Nano Lett., vol. 7, no. 5, pp. 1329-1337, 2007. (Pubitemid 46834418)
8. M. A. Reed, C. Zhou, C. J. Muller, T. P. Burgin, and J. M. Tour, "Conductance of a molecular junction," Science, vol. 278, p. 252, 1997.
9. E. P. D. Poorterea, H. L. Stormera, L. M. Huang, S. J. Wind, S. O. Briena, M. Huanga, and J. Honea, "1- to 2-nm-wide nanogaps fabricated with single-walled carbon nanotube shadow masks," J. Vac. Sci. Technol. B, vol. 24, no. 6, pp. 3213-3216, 2006. (Pubitemid 44866500)
10. G. Esen and M. S. Fuhrer, "Temperature control of electromigration to form gold nanogap junctions," Appl. Phys. Lett., vol. 87, p. 263101, 2005.
11. L. D. L. S. Valladares, L. L. Felix, A. B. Dominguez, T. Mitrelias, F. Sfigakis, S. I. Khondaker, C. H. W. Barnes, and Y. Majima, "Controlled electroplating and electromigration in nickel electrodes for nanogap formation," Nanotechnology, vol. 21, no. 44, p. 445304, 2010.
12. T. Nagase, K. Gamo, T. Kubota, and S. Mashiko, "Direct fabrication of nano-gap electrodes by focused ion beam etching," Thin Solid Films, vol. 499, no. 1-2, pp. 279-284, 2006. (Pubitemid 43165580)
13. S. M. Dirk, S. W. Howell, S. Zmuda, K. Childs, M. Blain, R. J. Simonson, and D. R. Wheeler, "Novel one-dimensional nanogap created with standard optical lithography and evaporation procedures," Nanotechnology, vol. 16, no. 10, p. 1983, 2005.
14. V. Milanovic, L. Doherty, D. Teasdale, C. Zhang, S. Parsa, V. Nguyen, M. Last, and K. Pister, "Deep reactive ion etching for lateral field emission devices," Electron Device Letters, IEEE, vol. 21, no. 6, pp. 271 - 273, 2000.
15. M. Mita, H. Kawara, H. Toshiyoshi, J. Endo, and H. Fujita, "Bulk micromachined tunneling tips integrated with positioning actuators," Microelectromechanical Systems, Journal of, vol. 14, no. 1, pp. 23-28, 2005. (Pubitemid 40274553)
16. R. D. Grober, R. J. Schoelkopf, and D. E. Prober, "Optical antenna: Towards a unity efficiency near-field optical probe," Appl. Phys. Lett., vol. 70, pp. 1354 - 1356, 1997. (Pubitemid 127641730)