Hypodermic-needle-like hollow polymer microneedle array using UV lithography into micromolds

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 1039-1042

  Wang, Po Chun ^a   Paik, Seung Joon ^a   Kim, Jooncheol ^a   Kim, Seong Hyok ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION PROCESS; HIGH ASPECT RATIO; LITHOGRAPHY MASKS; MICRO MOLDS; MICROMOLDING; MICRONEEDLE ARRAYS; MICRONEEDLES; NEEDLE-LIKE; SINGLE-STEP; THREE DIMENSIONAL GEOMETRY; TRANSDERMAL DRUG DELIVERY; UV LITHOGRAPHY;

ASPECT RATIO; DRUG DELIVERY; FABRICATION; MASKS; MECHANICAL ENGINEERING; MECHANICS; MEMS; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING;

NEEDLES;

EID: 79953768195     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734606     Document Type: Conference Paper

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