Improving hardness of biomedical Co-Cr by deposition of dense and uniform TiN films using negative substrate bias during reactive sputtering

Materials Letters

Volumn 65, Issue 11, 2011, Pages 1707-1709

  Pham, Vuong Hung ^a   Yook, Se Won ^a   Li, Yuanlong ^a   Jeon, Gyuran ^a   Lee, Jung Joong ^a   Kim, Hyoun Ee ^a   Koh, Young Hag ^b  

^a Seoul National University   (South Korea)

^b Korea University   (South Korea)

Author keywords

Biomaterial; Hardness; TiN coating

Indexed keywords

DIRECT CURRENT SPUTTERING; HIGH HARDNESS; NEGATIVE SUBSTRATES; PREFERRED ORIENTATIONS; SMOOTH SURFACE; SUBSTRATE BIAS; SURFACE HARDNESS; TIN COATING; TIN FILMS;

BIOLOGICAL MATERIALS; COATINGS; HARDNESS; METALLIC FILMS; SUBSTRATES; TITANIUM NITRIDE;

COBALT;

EID: 79953254531     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2011.03.020     Document Type: Article

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