Diffraction-based solid immersion lens

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 21, Issue 7, 2004, Pages 1186-1191

  Brunner, Robert ^a   Burkhardt, Matthias ^a   Pesch, Alexander ^a   Sandfuchs, Oliver ^a   Ferstl, Margit ^b   Hohng, Sungchul ^c   White, Jeffrey O ^c  

^a CARL ZEISS SMT AG   (Germany)

^b FRAUNHOFER HEINRICH HERTZ INSTITUTE   (Germany)

^c University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; DIFFRACTIVE OPTICS; ELECTRON BEAM LITHOGRAPHY; OPTICAL DESIGN; OPTICAL MICROSCOPY; OPTICAL TRANSFER FUNCTION; REACTIVE ION ETCHING; REFRACTIVE INDEX;

FRESNEL ZONE PLATE; HUYGENS-FRESNEL PRINCIPLE; SOLID IMMERSION LENS;

LENSES;

EID: 3142765327     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.21.001186     Document Type: Article

References (9)

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