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Volumn 5183, Issue , 2003, Pages 47-55
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New Solutions to Realize Complex Optical Systems by a Combination of Diffractive and Refractive Optical Components
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Author keywords
Diffractive optics; Holographic lithography; Hybrid optics; Slit lamp; Wafer inspection
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Indexed keywords
DIFFRACTIVE OPTICS;
HOLOGRAPHY;
IMAGING SYSTEMS;
LIGHT REFLECTION;
OPTICAL DEVICES;
OPTICAL SYSTEMS;
OPTIMIZATION;
ULTRAVIOLET RADIATION;
AUTOFOCUS SYSTEMS;
DIFFRACTIVE OPTICAL ELEMENTS (DOE);
REALIZATION;
PHOTOLITHOGRAPHY;
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EID: 2342450045
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.509459 Document Type: Conference Paper |
Times cited : (21)
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References (4)
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