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Volumn 115, Issue 12, 2011, Pages 5028-5037
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Laser-induced liquefaction of tetrafluoroethane and sulfur hexafluoride Gases
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Author keywords
[No Author keywords available]
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Indexed keywords
ELEMENTAL COMPOSITIONS;
HIGH ASPECT RATIO TRENCHES;
INDUSTRIAL TOOLS;
LASER INDUCED;
LASER INTERACTION;
LIQUID MEDIUM;
MATERIAL REMOVAL PROCESS;
NANOSECOND LASER ABLATION;
PHYSICAL PROCESS;
REALTIME IMAGING;
REDEPOSITION;
SEM;
SILICON MICROSTRUCTURES;
SPATIAL CHARACTERISTICS;
TETRAFLUOROETHANE;
TRANSIENT LIQUID PHASE;
ASPECT RATIO;
ELECTROMAGNETIC LAUNCHERS;
LASER ABLATION;
LASER APPLICATIONS;
LIQUIDS;
MATERIALS;
SULFUR;
SULFUR HEXAFLUORIDE;
LIQUEFACTION OF GASES;
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EID: 79953064696
PISSN: 19327447
EISSN: 19327455
Source Type: Journal
DOI: 10.1021/jp108855h Document Type: Article |
Times cited : (4)
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References (27)
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