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Volumn 115, Issue 12, 2011, Pages 5028-5037

Laser-induced liquefaction of tetrafluoroethane and sulfur hexafluoride Gases

Author keywords

[No Author keywords available]

Indexed keywords

ELEMENTAL COMPOSITIONS; HIGH ASPECT RATIO TRENCHES; INDUSTRIAL TOOLS; LASER INDUCED; LASER INTERACTION; LIQUID MEDIUM; MATERIAL REMOVAL PROCESS; NANOSECOND LASER ABLATION; PHYSICAL PROCESS; REALTIME IMAGING; REDEPOSITION; SEM; SILICON MICROSTRUCTURES; SPATIAL CHARACTERISTICS; TETRAFLUOROETHANE; TRANSIENT LIQUID PHASE;

EID: 79953064696     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp108855h     Document Type: Article
Times cited : (4)

References (27)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.