Distribution and content of hydrogen in DLC films prepared by plasma based pulsed bias deposition

Wuji Cailiao Xuebao/Journal of Inorganic Materials

Volumn 17, Issue 4, 2002, Pages 777-781

  Xia, Li Fang ^a   Sun, Ming Ren ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

DLC film; Hydrogen content; Hydrogen distribution

Indexed keywords

DEPOSITION; HYDROGEN; MANUFACTURE; PLASMAS;

HYDROGEN CONTENT; HYDROGEN DISTRIBUTION; PLASMA BASED PULSED BIAS DEPOSITION;

DIAMOND LIKE CARBON FILMS;

EID: 0036659184     PISSN: 1000324X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)