SCOPUS 정보 검색 플랫폼

ECS Transactions

Volumn 25, Issue 38, 2009, Pages 37-46

Influence of carbon nanotubes on the electrodeposition of copper interconnects

(2) Chowdhury, T a Rohan, J F a

a UNIVERSITY COLLEGE CORK (Ireland)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; CHRONOAMPEROMETRY; COMPOSITE FILMS; COPPER; ELECTRODEPOSITION; ELECTRODES;

ANNEAL TEMPERATURES; CO DEPOSITION; COPPER INTERCONNECTS; CU ELECTRODEPOSITIONS; CU EXCHANGES; ELECTROCHEMICAL DATA; EQUILIBRIUM POTENTIALS; KINETIC DATA;

INTEGRATED CIRCUIT INTERCONNECTS;

EID: 79952759923 PISSN: 19385862 EISSN: 19386737 Source Type: Conference Proceeding
DOI: 10.1149/1.3390656 Document Type: Conference Paper

Times cited : (6)

References (15)

1
- 0032166781
- P. C. Andricacos, C. Uzoh, J. O. Dukovic, J. Horkans, and H. Deligianni., IBM J. Res. and Dev., 42, 567 (1998).
- (1998) IBM J. Res. and Dev. , vol.42 , pp. 567
- Andricacos, P.C.¹ Uzoh, C.² Dukovic, J.O.³ Horkans, J.⁴ Deligianni, H.⁵

2
- 13844256568
- P. M. Vereecken, R. A. Binstead, H. Deligianni and P. C. Andricacos, IBM J. Res. and Dev., 49, 3 (2005).
- (2005) IBM J. Res. and Dev. , vol.49 , pp. 3
- Vereecken, P.M.¹ Binstead, R.A.² Deligianni, H.³ Andricacos, P.C.⁴

3
- 0342819025
- S. Iijima, Nature, 354, 56 (1991).
- (1991) Nature , vol.354 , pp. 56
- Iijima, S.¹

4
- 35348906655
- IEEE
- Y Chai, K. Zhang, M. Zhang, P. Chen and M. Yuen., Electronic Components and Technology Conference, IEEE, 1224 (2007).
- (2007) Electronic Components and Technology Conference , pp. 1224
- Chai, Y.¹ Zhang, K.² Zhang, M.³ Chen, P.⁴ Yuen, M.⁵

5
- 51349153025
- J. Yoo, J. Song, J. Yu, H. Lyeo, S. Lee and J. Hahn., Electronic Components and Technology Conference, ECTC, 1282 (2008).
- (2008) Electronic Components and Technology Conference, ECTC , pp. 1282
- Yoo, J.¹ Song, J.² Yu, J.³ Lyeo, H.⁴ Lee, S.⁵ Hahn, J.⁶

6
- 51349158937
- IEEE
- Y Chai, P. Chan and Y. Fu., Electronic Components and Technology Conference, IEEE, 412 (2008).
- (2008) Electronic Components and Technology Conference , pp. 412
- Chai, Y.¹ Chan, P.² Fu, Y.³

7
- 0037420379
- J. Wang, M. Musameh and Y. Lin., J. Am. Chem. Soc., 125, 2408 (2003).
- (2003) J. Am. Chem. Soc. , vol.125 , pp. 2408
- Wang, J.¹ Musameh, M.² Lin, Y.³

8
- 33847763721
- J. Lee, U. Paik, J. Choi, K. Kim, S. Yoon, J. Lee, B. Kim, J. Kim, M. Park, C. Yang, K. An and Y. Lee, J. Phys. Chem. C, 111, 2477 (2007).
- (2007) J. Phys. Chem. C , vol.111 , pp. 2477
- Lee, J.¹ Paik, U.² Choi, J.³ Kim, K.⁴ Yoon, S.⁵ Lee, J.⁶ Kim, B.⁷ Kim, J.⁸ Park, M.⁹ Yang, C.¹⁰ An, K.¹¹ Lee, Y.¹²

9
- 50949119701
- L.C. Nagle and J.F. Rohan, J. Power Sources, 185, 411 (2008).
- (2008) J. Power Sources , vol.185 , pp. 411
- Nagle, L.C.¹ Rohan, J.F.²

10
- 0742307320
- S. MacHardy and L. Janssen, J. Appl. Electrochem., 34, 169 (2004).
- (2004) J. Appl. Electrochem. , vol.34 , pp. 169
- MacHardy, S.¹ Janssen, L.²

11
- 84975363534
- L. Grambow and W. Vielstich, J. Electrochem. Soc., 12, 779 (1974).
- (1974) J. Electrochem. Soc. , vol.12 , pp. 779
- Grambow, L.¹ Vielstich, W.²

12
- 0015616157
- C. Milora, J. Henrickson and W. Hahn, J. Electrochem. Soc., 120, 488 (1973).
- (1973) J. Electrochem. Soc. , vol.120 , pp. 488
- Milora, C.¹ Henrickson, J.² Hahn, W.³

13
- 27744607040
- X. Chen, C. Cheng, H. Xiao, H. Liu, L. Zhou and S. Li, G. Zhang, Tribology Int., 39, 22 (2006).
- (2006) Tribology Int. , vol.39 , pp. 22
- Chen, X.¹ Cheng, C.² Xiao, H.³ Liu, H.⁴ Zhou, L.⁵ Li, S.⁶ Zhang, G.⁷

14
- 40249100306
- C. Guo, Y Zuo, X. Zhao, J. Zhao and J. Xiong, Surf and Coat Tech., 202, 3385 (2008).
- (2008) Surf and Coat Tech. , vol.202 , pp. 3385
- Guo, C.¹ Zuo, Y.² Zhao, X.³ Zhao, J.⁴ Xiong, J.⁵

15
- 33846707899
- B. Praveen, T. Venkatesha, Y. Naik and K. Prashantha, Surf and Coat Tech., 201, 5836 (2007).
- (2007) Surf and Coat Tech. , vol.201 , pp. 5836
- Praveen, B.¹ Venkatesha, T.² Naik, Y.³ Prashantha, K.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.