GC-MS Investigation of Organosilicon and Fluorocarbon Fed Plasmas

Contributions to Plasma Physics

Volumn 51, Issue 2-3, 2011, Pages 137-142

  Fanelli, F ^a   Fracassi, F ^a   Lovascio, S ^a   d'Agostino, R ^a  

^a UNIVERSITY OF BARI   (Italy)

Author keywords

Atmospheric pressure DBD; Fluorocarbons; Gascromatography mass spectrometry; Organosilicons

Indexed keywords

ATMOSPHERIC PRESSURE; DIELECTRIC BARRIER DISCHARGE; DIELECTRIC MATERIALS; FLUOROCARBONS;

ATMOSPHERIC PRESSURE DBD; CVD PROCESS; DEPOSITION MECHANISM; DIAGNOSTICS TECHNIQUES; DIELECTRIC BARRIER DISCHARGES; FEED COMPOSITIONS; GASCROMATOGRAPHY-MASS SPECTROMETRY; ORGANOSILICONES; REACTIVE MOIETY; UNREACTED MONOMERS;

MASS SPECTROMETRY;

EID: 79952669243     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.201000051     Document Type: Article

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