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Volumn 4, Issue SUPPL.1, 2007, Pages
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Deposition of SiOx-like thin films from a mixture of HMDSO and oxygen by low pressure and DBD discharges to improve the corrosion behaviour of steel
a
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Author keywords
Atmospheric pressure; Corrosion protection; Low pressure; PECVD; SiOx; Structure; Thin films
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Indexed keywords
ANTI-CORROSIVE;
CONTINUOUS FILMS;
CORROSION BEHAVIOUR;
DEPOSITED FILMS;
DIELECTRIC BARRIER DISCHARGES;
FILM DEPOSITION;
HEXAMETHYL DISILOXANE;
LOW FREQUENCY;
LOW PRESSURE;
LOW PRESSURES;
NITROGEN ATMOSPHERES;
OXYGEN PLASMA PRETREATMENT;
PECVD;
PLASMA REACTORS;
POLYMER-LIKE STRUCTURES;
PROTECTIVE PROPERTIES;
RF GENERATORS;
SEM;
SILICON DIOXIDE;
SIOX;
STRUCTURE;
XPS;
ATMOSPHERIC PRESSURE;
ATMOSPHERICS;
CARBON FILMS;
CORROSION PROTECTION;
CORROSION RESISTANCE;
CORROSIVE EFFECTS;
DEPOSITION;
DIELECTRIC DEVICES;
ELECTRIC DISCHARGES;
ELECTRIC EQUIPMENT PROTECTION;
ELECTRIC REACTORS;
OXYGEN;
PLASMA DEPOSITION;
PLASMAS;
POLYMER FILMS;
SEMICONDUCTING SILICON COMPOUNDS;
SILICA;
SILICON OXIDES;
THIN FILMS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
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EID: 67650337197
PISSN: 16128850
EISSN: 16128869
Source Type: Journal
DOI: 10.1002/ppap.200731406 Document Type: Conference Paper |
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Times cited : (36)
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References (15)
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