Direct metal nano-imprinting using an embossed solid electrolyte stamp

Nanotechnology

Volumn 22, Issue 15, 2011, Pages

  Kumar, A ^a   Hsu, K H ^a   Jacobs, K E ^a   Ferreira, P M ^a   Fang, N X ^a,b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CANDIDATE MATERIALS; DIRECT-PATTERNING; FEATURE RECOVERY; LARGE-AREA PATTERNING; MATERIAL FLOW; MECHANICAL BEHAVIOR; METAL NANOSTRUCTURE; METAL PATTERNING; MICRO FORMING; NANO-IMPRINTING; NANOFABRICATION; SILVER SULFIDES; SUPER IONIC CONDUCTORS; SUPERIONIC;

MICROFABRICATION; SILVER COMPOUNDS; SOLID ELECTROLYTES;

FORMING;

EID: 79952662629     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/15/155302     Document Type: Article

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