Crystallization of amorphous Si 3 N 4 and superhardness effect in HfC/Si 3 N 4 nanomultilayers

Applied Surface Science

Volumn 257, Issue 13, 2011, Pages 5799-5802

  Li, Geyang ^a   Li, Guanqun ^a   Li, Yuge ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Coherent growth; Crystallization of amorphous; Superhardness effect

Indexed keywords

CHROMIUM COMPOUNDS; HAFNIUM COMPOUNDS; HARDNESS; MULTILAYERS; SILICON COMPOUNDS;

COHERENT GROWTH; COLUMNAR STRUCTURES; ENHANCED HARDNESS; LAYER THICKNESS; MICROSTRUCTURE AND MECHANICAL PROPERTIES; NANOMULTILAYERS; REACTIVE MAGNETRON SPUTTERING; SUPERHARDNESS EFFECT;

NITROGEN COMPOUNDS;

EID: 79952534715     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2011.01.106     Document Type: Article

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