Modeling and design of a low-voltage SOI suspended-gate MOSFET (SG-MOSFET) with a metal-over-gate architecture

Proceedings - International Symposium on Quality Electronic Design, ISQED

Volumn 2002-January, Issue , 2002, Pages 496-501

  Ionescu, Adrian M ^a   Pott, Vincent ^a   Fritschi, Raphael ^a   Banerjee, Kaustav ^a,b   Renaud, Philippe ^a   Hibert, Cyrille ^a   Fluckiger, Philippe ^a   Racine, Georges A ^a  

^a EPFL   (Switzerland)

^b Stanford University   (United States)

Author keywords

Analytical models; Biomembranes; Micromechanical devices; MOS capacitors; MOSFET circuits; Radio frequency; Radiofrequency microelectromechanical systems; Switches; Switching circuits; Voltage

Indexed keywords

ANALYTICAL MODELS; CHOPPERS (CIRCUITS); DESIGN; ELECTRIC NETWORK ANALYSIS; ELECTRIC POTENTIAL; ELECTROMECHANICAL DEVICES; MEMS; MICROELECTROMECHANICAL DEVICES; MOS CAPACITORS; MOS DEVICES; SWITCHES; SWITCHING CIRCUITS;

BIOMEMBRANES; ELECTROSTATIC CHARACTERISTICS; FABRICATION PROCESS; FIRST ORDER DESIGN; LOW VOLTAGE OPERATION; MICROMECHANICAL DEVICE; MOSFET CIRCUITS; RADIO FREQUENCIES;

MOSFET DEVICES;

EID: 79952516708     PISSN: 19483287     EISSN: 19483295     Source Type: Journal    
DOI: 10.1109/ISQED.2002.996794     Document Type: Article

References (11)

1. E.R. Brown, IEEE Trans. On Microwave Theory and Techniques, vol. 46 (1998) p. 1868.
2. C.L. Goldsmith and S. Eshelman, IEEE Microwave and Guid. Wave Letts., vol. 8 (1998) p. 269.
3. J. Seeger and S. Crary, Proc. of 1997 Int. Conf. on Solid-State Sensors and. Actuators (1997) p. 1133.
4. J. Zhuo, C. Liu, J. Schutt-Aine, J. Chen and S.-M. Kang, Proc. of IEDM 2000 (2000) p. 403.
5. Z. Yao, S. Chen, S. Eshelman, D. Dennison and C. Goldsmith, IEEE Journal of MEMS, vol. 8 (1999) p.129.
6. th Int. Conf. on Solid-State Sensors and Actuators, Eurosensors IX (1995) p. 384.
7. S. Pacheco, C.T. Nguyen, L. Katehi, Proc. of IEEE MTT-S International Microwave Symp., Baltimore, Maryland (1998) p.1569.
8. C.T. Nguyen, Proc. of SPIE, Santa Clara, California (1998) p. 24.
9. C.T. Nguyen, L. Katehi, G. Rebeiz, Proc. of IEEE, vol. 86 (1999) p. 1756.
10. S. Duffy, C. Bozler, S. Rabe, J. Knecht, L. Travis, P. Wyatt, C. Keast, M. Gouker, IEEE Microwave and Wireless Letts., vol. 11 (2001) p.106.
11. SOLIDIS - ISE, Reference manual, 2000.