Influence of sample processing parameters on thermal boundary conductance value in an Al/AlN system

Applied Physics Letters

Volumn 98, Issue 9, 2011, Pages

  Monachon, Christian ^a   Hojeij, Mohamad ^a   Weber, Ludger ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ADEQUATE MODELS; DATA EXTRACTION; METAL LAYER; NATIVE OXIDE LAYER; POLISHED SUBSTRATES; SAMPLE PROCESSING; THERMAL BOUNDARY CONDUCTANCE; TRANSIENT THERMOREFLECTANCE;

ALUMINUM NITRIDE; NITRIDES;

ALUMINUM;

EID: 79952380195     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3560469     Document Type: Article

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