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Applied Surface Science

Volumn 257, Issue 12, 2011, Pages 5175-5180

Carbon nitride films by RF plasma assisted PLD: Spectroscopic and electronic analysis

(7) Cappelli, E a Orlando, S b Trucchi, D M a Bellucci, A a Valentini, V a Mezzi, A c Kaciulis, S c

a ISC CNR (Italy)

b CNR (Italy)

c CNR (Italy)

Author keywords

Carbon nitride films; Optical emission spectroscopy; Raman spectroscopy; RF plasma PLD; Surface conductivity; XPS analysis

Indexed keywords

CARBON FILMS; CARBON NITRIDE; CHEMICAL BONDS; ELECTRIC CONDUCTIVITY; FILM GROWTH; LASER ABLATION; LIGHT EMISSION; NITRIDES; NITROGEN; NITROGEN PLASMA; OPTICAL EMISSION SPECTROSCOPY; PLASMA THEORY; RAMAN SPECTROSCOPY; SPECTROSCOPIC ANALYSIS; SPECTRUM ANALYSIS; TESTING; THIN FILMS; WAVE PLASMA INTERACTIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE FILMS; MICROSTRUCTURAL CHANGES; NITROGEN INCORPORATION; PURE NITROGEN ATMOSPHERE; RF PLASMA; RF PLASMA ASSISTED PLD; SURFACE CONDUCTIVITY; XPS ANALYSIS;

OPTICAL FILMS;

EID: 79952314974 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2010.12.065 Document Type: Conference Paper

Times cited : (15)

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