Comparative study of Laser induce damage of HfO2/SiO2 and TiO2/SiO2 mirrors at 1064 nm

Optics Express

Volumn 19, Issue 5, 2011, Pages 4059-4066

  Jiao, Hongfei ^a,b   Ding, Tao ^a,b   Zhang, Qian ^a,b  

^a TONGJI UNIVERSITY   (China)

^b Tongji University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; ELECTRON BEAMS; HAFNIUM COMPOUNDS; IRRADIATION; LASER DAMAGE; MIRRORS; MORPHOLOGY; REFLECTION;

1064 NM; BACK-SIDE IRRADIATION; COMPARATIVE STUDIES; DAMAGE MORPHOLOGY; ELECTRON BEAM EVAPORATION METHODS; HIGH REFLECTOR; INDUCED DAMAGE; LASER DAMAGE RESISTANCE; LASER-INDUCED DAMAGE; LOW BAND GAP; RASTER SCANS; THERMAL INDUCED STRESS; THERMAL MELTING; TIO;

SILICON COMPOUNDS;

HAFNIUM; HAFNIUM OXIDE; OXIDE; SILICON DIOXIDE; TITANIUM; TITANIUM DIOXIDE;

ARTICLE; COMPARATIVE STUDY; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; LASER; LIGHT; OPTICAL INSTRUMENTATION; RADIATION EXPOSURE;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; HAFNIUM; LASERS; LENSES; LIGHT; OXIDES; SILICON DIOXIDE; TITANIUM;

EID: 79952168725     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.004059     Document Type: Article

References (19)

1. M. R. Borden, J. A. Folta, C. J. Stolz, J. R. Taylor, J. E. Wolfe, A. J Griffin, M. D. Thomas, "Improved method for laser damage testing coated optics", Proc. SPIE 5991, 59912A1 (2005)
2. F. Y. Genin, and C. J. Stolz, "Morphologies of laser-induced damage in hafnia-silica multilayer mirror and polarizer coatings," Proc. SPIE 2870, 439-448 (1996).
3. M. R. Kozlowski, "Ri. Tench, R. Chow, L. Sheehan, "Influence of defect shape on laser induced damage in multilayer coatings," Proc. SPIE 2253, 743-750 (1994).
4. J. C. Stolz, J. Adams, M. D. Shirk, M. A. Norton, and T. L. Weiland, "Engineering meter-scale laser resistant coatings for the near IR", Proc. SPIE 5963, 59630Y1-9 (2005)
5. J. Christopher, Stolz, Michael D. Thomas and Andrew J. Griffin, "BDS thin film damage competition", Proc. SPIE 7132, 71320C1 (2008)
6. J. H. Campbell, R. A. Hawley-Fedder, C. J. Stolz, J. A. Menapace, M. R. Borden, P. K. Whitman, J. Yu, M. Runkel, M. O. Riley, M. D. Feit, and R. P. Hackel, "NIF optical materials and fabrication technologies: An overview," Proc. SPIE 5341, 84-101 (2004).
7. M. R. Kozlowski, and R. Chow, "The role of defects in laser damage of multilayer coatings," Proc. SPIE 2114, 640-649 (1994).
8. C. J. Stolz, R. J. Tench, M. R. Kozlowski, A. Fornier, "A comparison of nodular defect seed geometries from different deposition techniques," Proc. SPIE 2714, 374-382 (1995).
9. S. Papernov, and A. W. Schmid, "Laser-induced surface damage of optical materials: Absorption sources, initiation, growth, and mitigation", Proc. SPIE 7132, 71321J1 (2008)
10. E. Welsch, and D. Ristau, "Photothermal measurements on optical thin films," Appl. Opt. 34(31), 7239-7253 (1995).
11. J. Dijon, T. Poiroux, and C. Desrumaux, "Nano absorbing centers: a key point in laser damage thin films," Proc. SPIE 2966, 315-325 (1997).
12. L. Jensen, M. Jupé, and D. Ristau, "UV damage mechanisms in oxide high reflectors," Proc. SPIE 7132, 71320G, 71320G-12 (2008).
13. 2 thin films containing gold nanoparticles as artificial absorbing defects," Proc. SPIE 6720, 67200G (2007).
14. J. Hue, P. Garrec, J. Dijon, and P. Lyan, "R-on-1 automatic mapping: a new tool for laser damage testing," Proc. SPIE 2714, 90-101 (1996).
15. M. R. Borden, J. A. Folta, C. J. Stolz, J. R. Taylor, J. E. Wolfe, A. J. Griffin, and M. D. Thomas, "Improved method for laser damage testing coated optics", Proc. SPIE 5991, 59912A1 (2005)
16. M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, "Scaling laws of femtosecond laser pulse induced breakdown in oxide films," Phys. Rev. B 71(11), 115109 (2005).
17. 2 multilayer mirror and polarizer coatings," Proc. SPIE 2966, 273-282 (1997).
18. J.-Y. Natoli, F. Wagner, A. Ciapponi, S. Palmier, L. Gallais, M. Commandré, "Non destructive evaluation on optical components for high power density applications," Proc. SPIE 7101, 710118 (2008).
19. X. Cheng, Z. Shen, H. Jiao, J. Zhang, B. Ma, T. Ding, and Z. Wang, "Laser damage resistance of dichroic mirrors at 532 nm and 1064nm," Proc. SPIE 7842, 78420C, 78420C-8 (2010).