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Solid State Communications

Volumn 151, Issue 7, 2011, Pages 561-563

Substrate-dependent structure, microstructure, composition and properties of nanostructured TiN films

(3) Kiran, M S R N a,b Ghanashyam Krishna, M a Padmanabhan, K A a,c

a UNIVERSITY OF HYDERABAD (India)

b INDIAN INSTITUTE OF SCIENCE (India)

c UNIVERSITY OF MÜNSTER (Germany)

Author keywords

A. Thin films; D. Mechanical properties; D. Optical properties

Indexed keywords

A. THIN FILMS; AMBIENT TEMPERATURES; AMORPHOUS SUBSTRATE; CHEMICAL COMPOSITIONS; CRYSTALLINE SUBSTRATES; D. MECHANICAL PROPERTIES; D. OPTICAL PROPERTIES; DC REACTIVE MAGNETRON SPUTTERING; DIFFERENT SUBSTRATES; LANTHANUM ALUMINATE; LOWER HARDNESS; MODULUS VALUES; NANO GRAINS; NANO-STRUCTURED; SPECULAR REFLECTANCE; SPUTTER GAS; TIN FILMS; TITANIUM NITRIDE FILMS;

AMORPHOUS FILMS; CRYSTALLINE MATERIALS; GRAIN GROWTH; HARDNESS; LANTHANUM ALLOYS; MECHANICAL PROPERTIES; MICROSTRUCTURE; NITROGEN; OPTICAL PROPERTIES; STOICHIOMETRY; TEMPERATURE; THIN FILMS; TITANIUM; TITANIUM NITRIDE;

SUBSTRATES;

EID: 79952038589 PISSN: 00381098 EISSN: None Source Type: Journal
DOI: 10.1016/j.ssc.2011.01.009 Document Type: Article

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.