Highly sensitive and selective NO2 sensing using epitaxial graphene on 6H-SiC

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 889-893

  Koley, Goutam ^a   Nomani, Md W K ^a   Spencer, M G ^b  

^a The Department of Mechanical Engineering   (United States)

^b School of Operations Research and Industrial Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORBED MOLECULES; DETECTION SENSITIVITY; EPITAXIAL GRAPHENE; FAST RESPONSE TIME; GRAPHENE LAYERS; HIGH CONCENTRATION; HIGHER TEMPERATURES; HIGHLY SENSITIVE; MOLECULAR ADSORPTION; RESPONSE TIME; SATURATED VAPOR; SEMI-INSULATING; SIC SUBSTRATES; SURFACE WORK FUNCTIONS;

ADSORPTION; CHARGE TRANSFER; EPITAXIAL FILMS; EPITAXIAL GROWTH; GRAPHENE; ION EXCHANGE; SENSORS; SILICON CARBIDE;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 79951919816     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690875     Document Type: Conference Paper

References (29)

1. 3," Sens. Actuat. B, Vol. 47, pp. 92-99, 1998.
2. T. Becker, S. Muhlberger, C. Braunmuhl, G. Muller, T. Ziemann, and K.V. Hechtenberg, "Air pollution monitoring using tin-oxide-based microreactor systems," Sens. Actuat. B, Vol. 69, pp. 108-119, 2000.
3. Z. Fan and J.G. Lu, "Gate-refreshable nanowire chemical sensors," Appl. Phys. Lett., Vol. 86, pp. 123510:1-3, 2005.
4. G. Sberveglieri, L. Depero, S. Groppelli, P. Nelli, "WO3 sputtered thinfilms for NOx monitoring," Sens. Actuat. B, Vol. 26, pp. 89-92, 1995.
5. J. Li, Y. Lu, Q. Ye, M. Cinke, J. Han, and M. Meyyappan, "Carbon nanotube sensors for gas and organic vapor detection," Nano Lett., Vol. 3, pp. 929-933, 2003.
6. J. Kong, N. Franklin, C. Zhou, M. G. Chapline, S. Peng, K. Cho, and H. Dai, "Nanotube molecular wires as chemical sensors," Science, Vol. 287, pp. 622-625, 2000.
7. P.G. Collins, K. Bradley, M. Ishigami, and A. Zettl, "Extreme oxygen sensitivity of electronic properties of carbon nanotubes," Science, Vol. 287, pp. 1801-1804, 2000.
8. E.S. Snow, F.K. Perkins, E.J. Houser, S.C. Badescu, and T. L. Reinecke, "Chemical detection with a single-walled carbon nanotube capacitor," Science, Vol. 307, pp. 1942-1945, 2005.
9. A. K. Geim and K. S. Novoselov, "The rise of graphene," Nat. Mat., Vol. 6, pp. 183-191, 2007.
10. I. W. Frank, D. M. Tanenbaum, A. M. Van der Zande, and P. L. McEuen, "Mechanical properties of suspended graphene sheets," J. Vac. Sci. Technol. B, Vol. 25, pp. 2558-2561, 2007.
11. A.A. Balandin, S. Ghosh, W.Z. Bao, I. Calizo, D. Teweldebrhan, F. Miao, and C. N. Lau, "Superior thermal conductivity of single-layer graphene," Nano Lett., Vol. 8, pp. 902-907, 2008.
12. K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, Y. Zhang, S. V. Dubonos, I. V. Grigorieva, and A. A. Firsov, "Electric field effect in atomically thin carbon films," Science, Vol. 306, pp. 666-669, 2004.
13. K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, M.I. Katsnelson, I. V. Grigorieva, S.V. Dubonos, and A. Firsov, "A Two-dimensional gas of massless Dirac fermions in grapheme," Nature, Vol. 438, pp. 197-200, 2005.
14. Y.B. Zhang, Y.W. Tan, H.L. Stormer, and P. Kim, "Experimental observation of the quantum Hall effect and Berry's phase in grapheme," Nature, Vol. 438, pp. 201-204, 2005.
15. K.S. Novoselov, D. Jiang, F. Schedin, T.J. Booth, V.V. Khotkevich, S.V. Morozov, and A.K. Geim, "Two dimensional atomic crystals," Proc. Natl Acad. Sci. USA, Vol. 102, pp. 10451-10453, 2005.
16. K. S. Novoselov, Z. Jiang, Y. Zhang, S. V. Morozov, H. L. Stormer, U. Zeitler, J. C. Maan, G. S. Boebinger, P. Kim, and A.K. Geim, "Roomtemperature quantum Hall effect in graphene," Science, Vol. 315, pp. 1379-1379, 2007.
17. R. Ruoff, "Calling all chemists," Nat. Nanotechnol., Vol. 3, pp. 10-11, 2008.
18. D. Yang, A. Velamakanni, G. Bozoklu, S. Park, M. Stoller, R. D. Piner, S. Stankovich, I. Jung, D.A. Field, C.A. Ventrice, Jr., and R.S. Ruoff, "Chemical Analysis of Graphene Oxide Films After Heat and Chemical Treatments by X-ray Photoelectron and Micro-Raman Spectroscopy," Carbon, Vol. 47, pp. 145-152, 2009.
19. I. Jung, D. Dikin, S. Park, W. Cai, S. L. Mielke, and R. S. Ruoff, "Effect of Water Vapor on Electrical Properties of Individual Reduced Graphene Oxide Sheets," J. Phys. Chem. C, Vol. 112, pp. 20264- 20268, 2008.
20. A. Reina, X. Jia, J. Ho, D. Nezich, H. Son, V. Bulovic, M. S. Dresselhaus, and J. Kong, "Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition," Nano Lett., Vol. 9, pp. 30-35, 2009.
21. C. Berger, Z. Song, T. Li, X. Li, A.Y. Ogbazghi, R. Feng, Z. Dai, A.N. Marchenkov, E.H. Conrad, P.N. First, and W.A. de Heer, "Ultrathin epitaxial graphite: 2D electron gas properties and a route toward graphene-based nanoelectronics," J. Phys. Chem. B, Vol. 108, pp. 19912-19916, 2004.
22. C. Berger, Z.M. Song, X. Li, X. Wu, N. Brown, C. Naud, D. Mayou, T. Li, J. Hass, A.N. Marchenkov, E.H. Conrad, P.N. Phillip, and W.A. de Heer, "Electronic confinement and coherence in patterned epitaxial graphene," Science, Vol. 312, pp. 1191-1196, 2006.
23. D.V. Badami, "Graphitization of alpha-silicon carbide," Nature, Vol. 193, pp. 570-571, 1962.
24. F. Schedin, A.K. Geim, S.V. Morozov, E. W. Hill, P. Blake, M. I. Katsnelson, and K.S. Novoselov, "Detection of individual gas molecules adsorbed on graphene," Nat. Mater., Vol. 6, pp. 652-655, 2007.
25. M.S. Dresselhaus and G. Dresselhaus, "Intercalation compounds of graphite," Adv. Phys., Vol. 51, pp. 1-186, 2005.
26. A.C. Ferrari and J. Robertson, "Interpretation of Raman spectra of disordered and amorphous carbon," Phys. Rev. B, Vol. 61, pp. 14095-14107, 2000.
27. S. Shivaraman, M.V.S. Chandrashekhar, J.J. Boeckl, and M. G. Spencer, "Thickness Estimation of Epitaxial Graphene on SiC Using Attenuation of Substrate Raman Intensity," J. Elec. Mat, Vol. 38, pp. 725-730, 2009.
28. J.L. Tedesco, B.L. VanMil, R.L. Myers-Ward, J.M. McCrate, S.A. Kitt, P.M. Campbell, G.G. Jernigan, J.C. Culbertson, C.R. Eddy Jr., and D.K. Gaskill, "Hall Effect Mobility of Epitaxial Graphene Grown on Silicon Carbide," Appl. Phys. Lett., Vol. 95, pp. 122102:1-3, 2009.
29. 2 and NO on graphene: A first-principles study," Phys. Rev. B, Vol. 77, pp. 125416:1-6, 2008.