Thickness estimation of epitaxial graphene on sic using attenuation of substrate raman intensity

Journal of Electronic Materials

Volumn 38, Issue 6, 2009, Pages 725-730

  Shivaraman, Shriram ^a   Chandrashekhar, M V S ^a   Boeckl, John J ^b   Spencer, Michael G ^a  

^a Cornell University   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Graphene; Mapping; Raman intensity; Thickness estimation

Indexed keywords

EPITAXIAL GRAPHENE; GRAIN SIZE; GRAPHENE; GRAPHENE LAYERS; NONINVASIVE METHODS; OVERLAYER MODEL; RAMAN INTENSITIES; RAMAN INTENSITY; RAMAN SIGNAL; SIMULTANEOUS DETERMINATIONS; TEM; THICKNESS ESTIMATION; XPS;

ESTIMATION; MAPPING; MULTILAYER FILMS; RAMAN SPECTROSCOPY; SILICON CARBIDE; SUBSTRATES; THICKNESS MEASUREMENT; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

AUGER ELECTRON SPECTROSCOPY;

EID: 67650450237     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-009-0803-6     Document Type: Conference Paper

References (25)

1. K.S. Novoselov A.K. Geim S.V. Morozov D. Jiang Y. Zhang S.V. Dubonos I.V. Grigorieva A.A. Firsov 2004 Science 306 666 10.1126/science.1102896
2. A.H. Castro Neto F. Guinea N.M.R. Peres K.S. Novoselov A.K. Geim 2009 Rev. Mod. Phys. 81 109 10.1103/RevModPhys.81.109
3. K.S. Novoselov A.K. Geim S.V. Morozov D. Jiang M.I. Katsnelson I.V. Grigorieva S.V. Dubonos A.A. Firsov 2005 Nature 438 197 10.1038/nature04233
4. Y. Zhang Y. Tan H.L. Stormer P. Kim 2005 Nature 438 201 10.1038/nature04235
5. K.S. Novoselov Z. Jiang Y. Zhang S.V. Morozov H.L. Stormer U. Zeitler J.C. Maan G.S. Boebinger P. Kim A.K. Geim 2007 Science 315 1379 10.1126/science.1137201
6. F. Rana 2008 IEEE Trans. Nanotechnol. 7 91 10.1109/TNANO.2007.910334
7. G. Liang N. Neophytou D.E. Nikonov M.S. Lundstrom 2007 IEEE Trans. Electron. Dev. 54 657 10.1109/TED.2007.891872
8. J.R. Williams L. DiCarlo C.M. Marcus 2007 Science 317 638 10.1126/science.1144657
9. M.C. Lemme T.J. Echtermeyer M. Baus H. Kurz 2007 IEEE Electron. Dev. Lett. 28 284
10. F. Schedin A.K. Geim S.V. Morozov E.W. Hill P. Blake M.I. Katsnelson K.S. Novoselov 2007 Nat. Mater. 6 652 10.1038/nmat1967
11. C. Berger Z. Song T. Li X. Li A.Y. Ogbazghi R. Feng Z. Dai A.N. Marchenkov E.H. Conrad P.N. First W.A. de Heer 2004 J. Phys. Chem. B 108 19912 10.1021/jp040650f
12. C. Berger Z. Song X. Li X. Wu N. Brown C. Naud D. Mayou T. Li J. Hass A.N. Marchenkov E.H. Conrad P.N. First W.A. de Heer 2006 Science 312 1191 10.1126/science.1125925
13. J.M. Dawlaty S. Shivaraman M. Chandrashekhar F. Rana M.G. Spencer 2008 Appl. Phys. Lett. 92 042116 10.1063/1.2837539
14. D. Sun, Z. Wu, C. Divin, X. Li, C. Berger, W.A. de Heer, P. First, and T. Norris, arXiv:cond-mat/0803.2883 (2008).
15. E. Rollings G.-H. Gweon S. Zhou B. Mun J. McChesney B. Hussain A. Fedorov P. First W. de Heer A. Lanzara 2006 J. Phys. Chem. Solids 67 2172 10.1016/j.jpcs.2006.05.010
16. J.M. Dawlaty, S. Shivaraman, J. Strait, P. George, M. Chandrashekhar, F. Rana, and M.G. Spencer, arXiv:cond-mat/0801.3302 (2008).
17. S. Tanuma C.J. Powell D.R. Penn 2004 Surf. Interface Anal. 36 1 10.1002/sia.1601
18. E.D. Palik (ed.), Handbook of Optical Constants of Solids (New York: Academic Press, 1991).
19. F. Tuinstra J.L. Koenig 1970 J. Chem. Phys. 53 1126 10.1063/1.1674108
20. A.C. Ferrari J. Robertson 2000 Phys. Rev. B 61 14095 10.1103/PhysRevB.61. 14095
21. B. Hornetz H.-J. Michel J. Halbritter 1994 J. Mater. Res. 9 3088
22. P.J. Cumpson 2000 Surf. Interface Anal. 29 403 10.1002/1096-9918(200006) 29:6<403::AID-SIA884>3.0.CO;2-8
23. C. Thomsen S. Reich 2000 Phys. Rev. Lett. 85 5214 10.1103/PhysRevLett.85. 5214
24. J.C. Burton L. Sun F.H. Long Z.C. Feng I.T. Ferguson 1999 Phys. Rev. B 59 7282
25. Y. Wu K.F. Mak C.H. Lui J. Maultzsch T. Heinz 2008 Bull. Am. Phys. Soc. 53 L29.00006