Ti-doped In2O3 transparent conductive thin films with high transmittance and low resistivity

Optica Applicata

Volumn 40, Issue 4, 2010, Pages 751-757

  Song, Zhenyu ^a   Fu, Qiang ^a   Li, Lei ^a   Li, Li ^a   An, Yupeng ^a   Wang, Yiding ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

In2O3; Sputtering; Thin films; Transparent conductive oxide

Indexed keywords

ELECTRICAL AND OPTICAL PROPERTIES; GLASS SUBSTRATES; HIGH TRANSMITTANCE; IN2O3; LOW RESISTIVITY; RADIO-FREQUENCY SPUTTERING; SPUTTERING POWER; TRANSPARENT CONDUCTIVE OXIDES; TRANSPARENT CONDUCTIVE THIN FILMS; WAVELENGTH RANGES;

ELECTRIC PROPERTIES; OPTICAL PROPERTIES; OXIDE FILMS; SUBSTRATES; THIN FILMS;

CONDUCTIVE FILMS;

EID: 79951875585     PISSN: 00785466     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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