AlN based microgenerators for powering implantable sensor devices

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 8, Issue 2, 2011, Pages 476-478

  Bludau, O ^a   Rohlig C C ^a,b   Knobber F ^a,b   Kirste, L ^a   Sah, R E ^a   Driad, R ^a   Pletschen, W ^a   Lebedev, V ^a   Cimalla, V ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

AlN; Diffractometry; Microgenerator; Piezoelectricity; Vibrometry

Indexed keywords

ALN; ALN FILMS; ALN THIN FILMS; CANTILEVER STRUCTURES; DIFFRACTOMETRY; IMPLANTABLE SENSORS; MICRO-CANTILEVERS; MICROGENERATOR; MICROGENERATORS; SI (001) SUBSTRATE; VIBROMETRY;

CRYSTALLOGRAPHY; DIFFRACTION; ENERGY HARVESTING; MECHANICAL PROPERTIES; PIEZOELECTRIC DEVICES; SEMICONDUCTING SILICON COMPOUNDS; SENSOR NETWORKS;

PIEZOELECTRICITY;

EID: 79951708626     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.201000503     Document Type: Article

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