Dynamic characterization of thin aluminum nitride microstructures

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 8, Issue 2, 2011, Pages 479-481

  Knobber F ^a,b   Bludau, O ^b   Rohlig C C ^a,b   Sah, R E ^b   Williams, O A ^b   Kirste, L ^b   Leopold, S ^c   Patz D ^c   Cimalla, V ^b   Ambacher, O ^a,b   Lebedev, V ^b  

^a UNIVERSITY OF FREIBURG   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF   (Germany)

^c ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

AlN; Membrane; Nanodiamond; Piezoelectric MEMS

Indexed keywords

ALN; DYNAMIC CHARACTERIZATION; DYNAMIC MODES; LASER DOPPLER VIBROMETRY; MECHANICAL AND MATERIAL PROPERTIES; METAL CONTACTS; NANODIAMOND; PIEZOELECTRIC MEMS;

DIAMONDS; LASER DOPPLER VELOCIMETERS; MECHANICAL PROPERTIES; NITRIDES; PIEZOELECTRICITY;

ALUMINUM NITRIDE;

EID: 79951705216     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.201000512     Document Type: Article

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