SCOPUS 정보 검색 플랫폼

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 8, Issue 2, 2011, Pages 447-449

Low temperature (down to 450 °C) annealed TiAl contacts on N-type gallium nitride characterized by differential scanning calorimetry

(7) Thierry Jebali, Nicolas a,b Menard, Olivier b,c Chiriac, Rodica a Collard, Emmanuel b Brylinski, Christian a Cayrel, Frédéric c Alquier, Daniel c

a UNIVERSITÉ CLAUDE BERNARD LYON 1 (France)

b STMICROELECTRONICS (France)

c UNIVERSITÉ DE TOURS (France)

Author keywords

Differential scanning calorimetry; Gallium nitride; Ohmic contact; TiAl

Indexed keywords

ALUMINUM ALLOYS; ANNEALING; BINARY ALLOYS; CALORIMETERS; DIFFERENTIAL SCANNING CALORIMETRY; ELECTRIC CONTACTORS; GALLIUM NITRIDE; III-V SEMICONDUCTORS; NITRIDES; OHMIC CONTACTS; TEMPERATURE;

ANNEALING TEMPERATURES; COMPOUNDS FORMATION; OHMIC CONTACT FORMATION; SCHOTTKY CONTACTS; SOLID-SOLID REACTION; SPECIFIC CONTACT RESISTIVITY; STOICHIOMETRIC RATIO; TIAL;

TITANIUM ALLOYS;

EID: 79951703891 PISSN: 18626351 EISSN: 16101642 Source Type: Journal
DOI: 10.1002/pssc.201000597 Document Type: Article

Times cited : (6)

References (9)

1
- 77955458460
- C. Brylinski, O. Menard, N. Thierry-Jebali, F. Cayrel, and D. Alquier, Mater. Sci. Forum 645-648, 879 (2010).
- (2010) Mater. Sci. Forum , vol.645-648 , pp. 879
- Brylinski, C.¹ Menard, O.² Thierry-Jebali, N.³ Cayrel, F.⁴ Alquier, D.⁵

2
- 0001246773
- B. P. Luther, J. M. DeLucca, S. E. Mohney, and R. F. Karlicek, Jr., Appl. Phys. Lett. 71, 3859 (1997).
- (1997) Appl. Phys. Lett , vol.71 , pp. 3859
- Luther, B.P.¹ DeLucca, J.M.² Mohney, S.E.³ Karlicek Jr., R.F.⁴

3
- 0001246774
- B. P. Luther, S. E. Mohney, T. N. Jackson, M. Asif Khan, Q. Chen, and J. W. Yang, Appl. Phys. Lett. 70, 57 (1997).
- (1997) Appl. Phys. Lett , vol.70 , pp. 57
- Luther, B.P.¹ Mohney, S.E.² Jackson, T.N.³ Asif Khan, M.⁴ Chen, Q.⁵ Yang, J.W.⁶

4
- 0034227948
- J. S. Kwak, S. E. Mohney, J. Y. Lin, and R. S. Kern, Semicond. Sci. Technol. 15, 756 (2000).
- (2000) Semicond. Sci. Technol , vol.15 , pp. 756
- Kwak, J.S.¹ Mohney, S.E.² Lin, J.Y.³ Kern, R.S.⁴

5
- 79251561869
- O. Menard, F. Cayrel, E. Collard, and D. Alquier, Mater. Sci. Forum 615-617, 955 (2009).
- (2009) Mater. Sci. Forum , vol.615-617 , pp. 955
- Menard, O.¹ Cayrel, F.² Collard, E.³ Alquier, D.⁴

6
- 5644259934
- S. Ruvimov, Z. Liliental-Weber, J. Washburn, K. J. Duxstad, E. E. Haller, Z. F. Fan, S. N. Mohammad, W. Kim, A. E. Botchkarev, and H. Morkoc, Appl. Phys. Lett. 69, 1556 (1996).
- (1996) Appl. Phys. Lett , vol.69 , pp. 1556
- Ruvimov, S.¹ Liliental-Weber, Z.² Washburn, J.³ Duxstad, K.J.⁴ Haller, E.E.⁵ Fan, Z.F.⁶ Mohammad, S.N.⁷ Kim, W.⁸ Botchkarev, A.E.⁹ Morkoc, H.¹⁰

7
- 34948860095
- H. C. Lee, J. W. Bae, and G. Y. Yeom, J. Korean Phys. Soc. 57, 1046 (2007).
- (2007) J. Korean Phys. Soc. , vol.57 , pp. 1046
- Lee, H.C.¹ Bae, J.W.² Yeom, G.Y.³

8
- 9744257757
- D. Selvanathan, F. M. Mohammed, A. Tesfayesus, and I. Adesida, J. Vac. Sci. Technol. B 22, 2409 (2004).
- (2004) J. Vac. Sci. Technol. B , vol.22 , pp. 2409
- Selvanathan, D.¹ Mohammed, F.M.² Tesfayesus, A.³ Adesida, I.⁴

9
- 79951720130
- ASM International
- H. Baker and H. Okamoto, ASM International, Materia Park, 2.54 (1992).
- (1992) Materia Park
- Baker, H.¹ Okamoto, H.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.