Influence of argon and nitrogen admixture in HMDSO/O2 plasmas onto powder formation

Plasma Processes and Polymers

Volumn 8, Issue 2, 2011, Pages 108-117

  Ricci, Marina ^a   Dorier, Jean Luc ^a   Hollenstein, Christoph ^a   Fayet, Pierre ^b  

^a EPFL   (Switzerland)

^b Tetra Pak International SA   (Switzerland)

Author keywords

FTIR spectroscopy; HMDSO; OES; PECVD; powder

Indexed keywords

CHEMICAL CHARACTERISTIC; FTIR SPECTROSCOPY; GAS ADMIXTURES; HMDSO; IN-SITU; IN-SITU FT-IR; MULTISTEP GROWTH PROCESS; OES; OXIDE POWDER; OXYGEN CONTENT; PECVD; POWDER FORMATION; PRODUCTION RATES; REACTANT GAS;

ARGON; FOURIER TRANSFORMS; INERT GASES; OXYGEN; PLASMA POLYMERIZATION; PLASMAS; SILICON COMPOUNDS; SILICON OXIDES;

FOURIER TRANSFORM INFRARED SPECTROSCOPY;

EID: 79951651901     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.201000052     Document Type: Article

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